Haifa
Israel
6
2021-07-01
The entities that hold a legal rights for patent applications filed by inventor Dov Guy Ben:
Guy Ben Dov from Haifa, IL has applied for patents for these inventions. The list has both pending applications and granted patents:
Field-to-field corrections using overlay targets
#2 | 2020-06-25Field-to-field corrections using overlay targets
#3 | 2016-07-28Symmetric target design in scatterometry overlay metrology
#4 | 2015-07-23Symmetric target design in scatterometry overlay metrology
#5 | 2014-09-11Pupil plane calibration for scatterometry overlay measurement
#6 | 2014-04-24Phase characterization of targets
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