Murray D. Sirkis

City:

Tempe, Arizona

Country:

United States

Published Applications:

Last publication date:

2007-01-16

Top Assignees for applications by Murray D. Sirkis

The entities that hold a legal rights for patent applications filed by inventor Sirkis Murray D.:

Murray D. Sirkis from Tempe, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method and apparatus for improved plasma processing uniformity

Addition of power at selected harmonics of plasma processor drive frequency

Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer

Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma

InventorID:

7378172 ⎘