Sunnyvale, California
United States
4
2006-09-19
The entities that hold a legal rights for patent applications filed by inventor Wright Marilyn I.:
Marilyn I. Wright from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Capping layer for reducing amorphous carbon contamination of photoresist in semiconductor device manufacture; and process for making same
#2 | 2005-07-05Method for patterning a feature using a trimmed hardmask
#3 | 2005-05-31Antireflective bi-layer hardmask including a densified amorphous carbon layer
#4 | 2005-05-17L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials
7397791 ⎘