Milpitas, California
United States
11
2014-05-15
The entities that hold a legal rights for patent applications filed by inventor LEI Lawrence C.:
Lawrence C. LEI from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Atomic layer deposition apparatus
#2 | 2010-12-16Multi-station deposition apparatus and method
#3 | 2009-08-27Multi-station deposition apparatus and method
#4 | 2008-08-07Method and apparatus for measuring a thickness of a layer of a wafer
#5 | 2008-03-27Self aligning non contact shadow ring process kit
#6 | 2007-03-22Apparatus and method of dynamically measuring thickness of a layer of a substrate
#7 | 2006-09-26Method and apparatus for dynamically measuring the thickness of an object
#8 | 2005-12-08Multi-station deposition apparatus and method
#9 | 2005-08-23Multi-station deposition apparatus and method
#10 | 2005-06-30Clamshell and small volume chamber with fixed substrate support
#11 | 2005-03-15Clamshell and small volume chamber with fixed substrate support
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