Inventor profile of:

Peter Ventzek

City:

Austin, Texas

Country:

United States

Published Applications:

52

Last publication date:

2025-05-08

Top Assignees for applications by Peter Ventzek

The entities that hold a legal rights for patent applications filed by inventor Ventzek Peter:

Recent patent applications by Ventzek Peter

Peter Ventzek from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-05-08
US20250149295A1
Electricity

SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING

#2 | 2025-03-06
US20250076771A1
Physics

Methods for Extreme Ultraviolet (EUV) Resist Patterning Development

#3 | 2025-01-16
US20250022689A1
Electricity

GAS CLUSTER ASSISTED PLASMA PROCESSING

#4 | 2024-10-17
US20240347319A1
Electricity

SYSTEMS FOR REAL-TIME PULSE MEASUREMENT AND PULSE TIMING ADJUSTMENT TO CONTROL PLASMA PROCESS PERFORMANCE

#5 | 2023-10-26
US20230341781A1
Physics

Methods for extreme ultraviolet (EUV) resist patterning development

#6 | 2023-07-20
US20230230814A1
Electricity

Method and Apparatus for Plasma Processing

#7 | 2022-11-17
US20220367149A1
Electricity

Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance

#8 | 2022-10-27
US20220344162A1
Electricity

Method of forming a FET structure by selective deposition of film on source/drain contact

#9 | 2022-09-29
US20220310357A1
Electricity

Fast neutral generation for plasma processing

#10 | 2022-08-04
US20220246747A1
Electricity

Contact Etch Stop Layer with Improved Etch Stop Capability

#11 | 2022-08-04
US20220246438A1
Electricity

Cyclic plasma etch process

#12 | 2022-06-09
US20220181153A1
Electricity

Defect correction on metal resists

#13 | 2022-05-24
US17167199
Electricity

Methods for anisotropic etch of silicon-based materials with selectivity to organic materials

#14 | 2022-03-31
US20220102123A1
Electricity

Quantification of processing chamber species by electron energy sweep

#15 | 2022-03-24
US20220093395A1
Electricity

Cyclic low temperature film growth processes

#16 | 2022-03-10
US20220076923A1
Electricity

Impedance matching apparatus and control method

#17 | 2022-03-03
US20220068607A1
Electricity

Gas cluster assisted plasma processing

#18 | 2022-03-03
US20220068601A1
Electricity

Plasma processing systems and methods for chemical processing a substrate

#19 | 2022-03-01
US17037025
Electricity

Ion angle detector

#20 | 2022-02-24
US20220059358A1
Electricity

Pulsed capacitively coupled plasma processes

#21 | 2022-01-27
US20220028695A1
Electricity

Plasma Processing Methods Using Low Frequency Bias Pulses

#22 | 2022-01-27
US20220028659A1
Electricity

Broadband plasma processing systems and methods

#23 | 2021-09-23
US20210296132A1
Electricity

Method for dry etching compound materials

#24 | 2021-08-12
US20210249225A1
Electricity

Plasma processing methods using low frequency bias pulses

#25 | 2021-07-08
US20210210355A1
Electricity

Methods of Plasma Processing Using a Pulsed Electron Beam

#26 | 2021-05-20
US20210151296A1
Electricity

Mode-switching plasma systems and methods of operating thereof

#27 | 2021-03-18
US20210082668A1
Electricity

Plasma processing apparatuses including multiple electron sources

#28 | 2021-03-18
US20210082667A1
Electricity

Broadband plasma processing systems and methods

#29 | 2021-03-18
US20210082666A1
Electricity

Broadband plasma processing systems and methods

#30 | 2021-02-18
US20210050183A1
Electricity

Three-phase pulsing systems and methods for plasma processing

#31 | 2021-01-28
US20210027991A1
Electricity

Mode-switching plasma systems and methods of operating thereof

#32 | 2021-01-21
US20210020405A1
Electricity

EQUIPMENT AND METHODS FOR PLASMA PROCESSING

#33 | 2021-01-14
US20210013005A1
Electricity

Process control enabled VDC sensor for plasma process

#34 | 2020-12-03
US20200381261A1
Electricity

Method for dry etching compound materials

#35 | 2020-11-19
US20200365372A1
Electricity

Plasma processing apparatuses having a dielectric injector

#36 | 2020-11-19
US20200365369A1
Electricity

Apparatuses and methods for plasma processing

#37 | 2020-08-27
US20200273678A1
Electricity

Methods and systems for focus ring thickness determinations and feedback control

#38 | 2020-04-30
US20200135432A1
Electricity

Hybrid electron beam and RF plasma system for controlled content of radicals and ions

#39 | 2020-04-30
US20200135431A1
Electricity

Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma

#40 | 2020-03-05
US20200075346A1
Electricity

Apparatus and process for electron beam mediated plasma etch and deposition processes

#41 | 2020-03-05
US20200075293A1
Electricity

Method and apparatus for plasma processing

#42 | 2020-02-20
US20200058470A1
Electricity

Systems and methods of control for plasma processing

#43 | 2020-02-20
US20200058469A1
Electricity

Systems and methods of control for plasma processing

#44 | 2020-02-13
US20200051833A1
Electricity

Ruthenium hard mask process

#45 | 2019-11-07
US20190341226A1
Electricity

Radical source with contained plasma

#46 | 2019-01-31
US20190035604A1
Electricity

SOLID-STATE SOURCE OF ATOMIC SPECIE FOR ETCHING

#47 | 2018-01-25
US20180025916A1
Electricity

Monolayer film mediated precision material etch

#48 | 2018-01-25
US20180025908A1
Electricity

Monolayer film mediated precision film deposition

#49 | 2014-10-09
US20140302666A1
Electricity

Pulsed gas plasma doping method and apparatus

#50 | 2014-09-18
US20140262042A1
Electricity

Microwave surface-wave plasma device

#51 | 2014-09-18
US20140262041A1
Electricity

Microwave surface-wave plasma device

#52 | 2014-05-22
US20140138030A1
Electricity

CAPACITIVELY COUPLED PLASMA EQUIPMENT WITH UNIFORM PLASMA DENSITY

InventorID:

766961 ⎘