San Jose, California
United States
12
2026-02-05
The entities that hold a legal rights for patent applications filed by inventor BURROWS Brian:
Brian BURROWS from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND PROCESSING CHAMBER FOR REDUCING WARPAGE OF A SUBSTRATE
#2 | 2026-02-05CHAMBER FOR PROCESSING SUBSTRATES AT HIGH TEMPERATURES
#3 | 2026-02-05HEATING ASSEMBLY AND METHOD FOR A PROCESSING CHAMBER
#4 | 2024-09-26MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
#5 | 2021-06-24Linear lamp array for improved thermal uniformity and profile control
#6 | 2020-09-17QUALIFICATION AND REPAIR STATION
#7 | 2017-02-09Reflector and susceptor assembly for chemical vapor deposition reactor
#8 | 2016-02-23Fastener system for supporting a liner plate in a gas showerhead reactor
#9 | 2014-09-11Epitaxial lift off systems and methods
#10 | 2014-06-12System and method for improved epitaxial lift off
#11 | 2012-10-04System and method for improved epitaxial lift off
#12 | 2011-09-08Epitaxial lift off systems and methods
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