Meerbusch
Germany
15
2023-01-19
The entities that hold a legal rights for patent applications filed by inventor FUCHS Andreas:
Andreas FUCHS from Meerbusch, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METROLOGY METHOD, TARGET AND SUBSTRATE
#2 | 2022-02-24Metrology method, target and substrate
#3 | 2020-11-05Metrology method, target and substrate
#4 | 2019-11-14Metrology method, target and substrate
#5 | 2016-06-23Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method
#6 | 2016-03-03Metrology method, target and substrate
#7 | 2014-11-13Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#8 | 2014-11-06Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#9 | 2014-06-26Inspection methods, inspection apparatuses, and lithographic apparatuses
#10 | 2012-02-09Inspection apparatus and method for measuring a property of a substrate
#11 | 2012-01-19Method and apparatus for determining an overlay error
#12 | 2011-10-20Apparatus and method for inspecting a substrate
#13 | 2011-06-16Inspection apparatus for lithography
#14 | 2011-06-09Inspection method and apparatus, and corresponding lithographic apparatus
#15 | 2011-05-05Apparatus and method of measuring a property of a substrate
813063 ⎘