San Jose, California
United States
4
2017-03-14
The entities that hold a legal rights for patent applications filed by inventor YANG LIMING:
LIMING YANG from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Highly selective etching methods for etching dielectric materials
#2 | 2016-02-25High aspect ratio plasma etch for 3D NAND semiconductor applications
#3 | 2014-06-26METHOD OF CONTROLLING TRENCH MICROLOADING USING PLASMA PULSING
#4 | 2011-07-21Method of controlling trench microloading using plasma pulsing
815423 ⎘