Sunnyvale, California
United States
12
2018-01-25
The entities that hold a legal rights for patent applications filed by inventor KUMAR Surajit:
Surajit KUMAR from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Heating modulators to improve epi uniformity tuning
#2 | 2016-12-01PROCESS CHAMBER WITH REFLECTOR
#3 | 2016-08-11EPI base ring
#4 | 2016-06-16Apparatus for controlling temperature uniformity of a substrate
#5 | 2015-03-26CARBON FIBER RING SUSCEPTOR
#6 | 2014-11-27Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity
#7 | 2014-09-25REFLECTIVE LINERS
#8 | 2014-09-18EPI base ring
#9 | 2014-07-17Quartz upper and lower domes
#10 | 2012-04-19Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity
#11 | 2011-12-08Assembly for delivering RF power and DC voltage to a plasma processing chamber
#12 | 2011-07-28Apparatus for controlling the temperature uniformity of a substrate
838446 ⎘