Miyagi
Japan
14
2019-10-03
The entities that hold a legal rights for patent applications filed by inventor MIYOSHI Risako:
Risako MIYOSHI from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing system and method of determining flow rate of gas
#2 | 2019-07-11Method of determining flow rate of a gas in a substrate processing system
#3 | 2019-02-28Method of inspecting flow rate measuring system
#4 | 2018-12-27Method of inspecting gas supply system
#5 | 2018-12-27Method of inspecting gas supply system
#6 | 2018-10-18Method of obtaining output flow rate of flow rate controller and method of processing workpiece
#7 | 2018-03-15Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
#8 | 2018-02-22Method for inspecting shower plate of plasma processing apparatus
#9 | 2017-09-14Method of arranging treatment process
#10 | 2017-03-16Method of inspecting gas supply system
#11 | 2017-03-16Method of calculating output flow rate of flow rate controller
#12 | 2015-11-19Method for preventing explosion of exhaust gas in decompression processing apparatus
#13 | 2014-07-24Plasma processing apparatus
#14 | 2012-12-06Plasma processing apparatus and gas supply method therefor
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