Dresden
Germany
5
2014-07-24
The entities that hold a legal rights for patent applications filed by inventor Temchenko Vlad:
Vlad Temchenko from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for Exposing an Area on a Substrate to a Beam and Photolithographic System
#2 | 2010-02-18Method for exposing an area on a substrate to a beam and photolithographic system
#3 | 2009-09-17Reticle for use in a semiconductor lithographic system and method for modifying the same
#4 | 2009-07-23Lithography system with illumination monitor
#5 | 2008-11-20Optical components, illumination systems, and methods
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