🔗 Permalink

Inventor profile of:

LEON VOLFOVSKI

City:

Mountain View, California

Country:

United States

Published Applications:

36

Last publication date:

2024-01-18

Top Assignees for applications by LEON VOLFOVSKI

The entities that hold a legal rights for patent applications filed by inventor VOLFOVSKI LEON:

Applied Materials, Inc. 26 Santa Clara, CA United States
Sokudo Co., Ltd. 2 Shimogyo-ku, Japan
Sokudo Co., Ltd. 2 Kyoto, Japan

Recent patent applications by VOLFOVSKI LEON

LEON VOLFOVSKI from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2024-01-18

US20240021458A1

CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM

#2 | 2023-09-28

US20230307273A1

Sensor-based correction of robot-held object

#3 | 2021-07-15

US20210217650A1

Process kit ring adaptor

#4 | 2021-02-25

US20210057256A1

Calibration of an aligner station of a processing system

#5 | 2021-01-21

US20210020476A1

Multi-object capable loadlock system

#6 | 2020-12-31

US20200411347A1

Sensor-based correction of robot-held object

#7 | 2020-11-26

US20200373194A1

Process kit ring adaptor

#8 | 2020-11-26

US20200373190A1

Process kit enclosure system

#9 | 2015-12-10

US20150357228A1

Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods

#10 | 2015-03-19

US20150076135A1

Heated substrate support with temperature profile control

#11 | 2014-07-17

US20140197151A1

Substrate support with switchable multizone heater

#12 | 2013-10-03

US20130256966A1

Substrate support with feedthrough structure

#13 | 2013-04-11

US20130087309A1

SUBSTRATE SUPPORT WITH TEMPERATURE CONTROL

#14 | 2013-02-14

US20130037532A1

Substrate support with heater

#15 | 2012-12-20

US20120320361A1

Cluster tool architecture for processing a substrate

#16 | 2012-08-02

US20120196242A1

SUBSTRATE SUPPORT WITH HEATER AND RAPID TEMPERATURE CHANGE

#17 | 2012-07-19

US20120180983A1

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

#18 | 2012-03-08

US20120055916A1

METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES

#19 | 2011-06-30

US20110154590A1

Wafer edge cleaning

#20 | 2009-03-12

US20090067956A1

Cluster tool architecture for processing a substrate

#21 | 2009-03-12

US20090064929A1

Cluster tool architecture for processing a substrate

#22 | 2009-03-12

US20090064928A1

Cluster tool architecture for processing a substrate

#23 | 2009-02-19

US20090044831A1

WAFER EDGE CLEANING

#24 | 2009-02-05

US20090031516A1

METHODS AND APPARATUS FOR INSTALLING A SCRUBBER BRUSH ON A MANDREL

#25 | 2009-02-05

US20090031511A1

Wafer edge cleaning

#26 | 2009-01-29

US20090025197A1

Methods and apparatus for installing a scrubber brush on a mandrel

#27 | 2008-09-18

US20080223293A1

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

#28 | 2008-08-21

US20080199282A1

Cluster tool architecture for processing a substrate

#29 | 2007-11-01

US20070254493A1

Integrated thermal unit having vertically arranged bake and chill plates

#30 | 2006-12-21

US20060286300A1

Cluster tool architecture for processing a substrate

#31 | 2006-12-14

US20060278165A1

Cluster tool architecture for processing a substrate

#32 | 2006-06-22

US20060134330A1

Cluster tool architecture for processing a substrate

#33 | 2006-06-22

US20060130751A1

Cluster tool substrate throughput optimization

#34 | 2006-06-22

US20060130750A1

Cluster tool architecture for processing a substrate

#35 | 2005-08-11

US20050172438A1

Methods and apparatus for installing a scrubber brush on a mandrel

#36 | 2005-08-11

US20050172430A1

Wafer edge cleaning

InventorID:

84543 ⎘