Hasselt
Belgium
3
2016-06-30
The entities that hold a legal rights for patent applications filed by inventor SMEETS Dries:
Dries SMEETS from Hasselt, BE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical element and optical system for EUV lithography, and method for treating such an optical element
#2 | 2014-11-27Device, lithographic apparatus, method for guiding radiation and device manufacturing method
#3 | 2014-07-31Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method
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