Takehiro Kato

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2026-05-07

Top Assignees for applications by Takehiro Kato

The entities that hold a legal rights for patent applications filed by inventor Kato Takehiro:

Takehiro Kato from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

STAGE AND SUBSTRATE PROCESSING APPARATUS

Semiconductor manufacturing device and processing method

Semiconductor manufacturing device and processing method

InventorID:

854622 ⎘