San Jose, California
United States
11
2019-07-25
The entities that hold a legal rights for patent applications filed by inventor TJANDRA AGUS SOFIAN:
AGUS SOFIAN TJANDRA from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Side inject designs for improved radical concentrations
#2 | 2019-01-03Silicon germanium selective oxidation process
#3 | 2018-12-06Remote plasma oxidation chamber
#4 | 2018-07-05Gas injection apparatus with heating channels
#5 | 2018-02-01Silicon germanium selective oxidation process
#6 | 2017-11-02Side inject nozzle design for processing chamber
#7 | 2016-01-14H/Oside inject to improve process uniformity for low temperature oxidation process
#8 | 2014-11-27METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE
#9 | 2014-08-07Gas injection apparatus and substrate process chamber incorporating same
#10 | 2010-12-30Methods of forming oxide layers on substrates
#11 | 2010-05-13PLASMA AND THERMAL ANNEAL TREATMENT TO IMPROVE OXIDATION RESISTANCE OF METAL-CONTAINING FILMS
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