Milpitas, California
United States
9
2020-03-05
The entities that hold a legal rights for patent applications filed by inventor PHI Justin:
Justin PHI from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Radio frequency (RF) pulsing impedance tuning with multiplier mode
#2 | 2020-02-13Substrate carrier using a proportional thermal fluid delivery system
#3 | 2018-01-16Smart multi-level RF pulsing methods
#4 | 2017-12-14RF power delivery regulation for processing substrates
#5 | 2017-04-06RF power delivery with approximated saw tooth wave pulsing
#6 | 2017-04-06RF power delivery regulation for processing substrates
#7 | 2016-05-26Substrate carrier using a proportional thermal fluid delivery system
#8 | 2014-11-20ETCH PROCESS HAVING ADAPTIVE CONTROL WITH ETCH DEPTH OF PRESSURE AND POWER
#9 | 2014-08-14AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN PLASMA PROCESSING SYSTEM
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