Stolpen
Germany
6
2020-11-26
The entities that hold a legal rights for patent applications filed by inventor Heller Marcel:
Marcel Heller from Stolpen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of implanting an implant species into a substrate at different depths
#2 | 2017-06-22Method for processing a carrier, a carrier, an electronic device and a lithographic mask
#3 | 2015-10-08Method for processing a carrier, a carrier, an electronic device and a lithographic mask
#4 | 2014-08-21Method for processing a carrier, a carrier, an electronic device and a lithographic mask
#5 | 2009-12-24Methods for Manufacturing a Structure on a Substrate, Method for Manufacturing a Semiconductor Device and an Intermediate Product
#6 | 2009-12-17METHOD AND APPARATUS FOR RESIST DEVELOPMENT
876674 ⎘