Pleasanton, California
United States
33
2026-03-12
The entities that hold a legal rights for patent applications filed by inventor Rice Michael Robert:
Michael Robert Rice from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PROCESSING CHAMBER WITH GAS RECYCLING
#2 | 2024-11-07PROCESSING CHAMBER WITH GAS RECYCLING
#3 | 2024-10-24Dithering or dynamic offsets for improved uniformity
#4 | 2024-03-21SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
#5 | 2023-12-21Electronic device manufacturing system
#6 | 2023-08-10Sealed substrate carriers and systems and methods for transporting substrates
#7 | 2021-05-13TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR DEVICE MANUFACTURING PROCESSING TOOLS, AND PROCESSING METHODS
#8 | 2020-05-28Electronic device manufacturing system
#9 | 2020-04-23Sealed substrate carriers and systems and methods for transporting substrates
#10 | 2019-07-11Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
#11 | 2019-01-10SEMICONDUCTOR DEVICE MANUFACTURING PLATFORM WITH SINGLE AND TWINNED PROCESSING CHAMBERS
#12 | 2018-05-17Sealed substrate carriers and systems and methods for transporting substrates
#13 | 2017-10-05Electronic device manufacturing system
#14 | 2016-08-04Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
#15 | 2015-03-26Electronic device manufacturing system
#16 | 2015-01-15Sealed substrate carriers and systems and methods for transporting substrates
#17 | 2014-09-18Semiconductor device manufacturing platform with single and twinned processing chambers
#18 | 2014-02-27Methods and apparatus for enhanced gas flow rate control
#19 | 2014-02-13Linked vacuum processing tools and methods of using the same
#20 | 2013-02-14Degassing apparatus adapted to process substrates in multiple tiers with second actuator
#21 | 2009-04-30Sealed substrate carriers and systems and methods for transporting substrates
#22 | 2008-11-27System for transporting substrate carriers
#23 | 2008-11-20Methods and apparatus for repositioning support for a substrate carrier
#24 | 2007-11-29Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
#25 | 2007-10-11System for transporting substrate carriers
#26 | 2007-08-21Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
#27 | 2007-07-10Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
#28 | 2007-06-26System for transporting substrate carriers
#29 | 2007-03-15Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
#30 | 2007-03-15System for transporting substrate carriers
#31 | 2006-11-16Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
#32 | 2006-01-19Methods and apparatus for repositioning support for a substrate carrier
#33 | 2005-04-07Processing system with the dual end-effector handling
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