Suwon-si
South Korea
53
2025-11-20
The entities that hold a legal rights for patent applications filed by inventor LEE Kun-Tack:
Kun-Tack LEE from Suwon-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
#2 | 2025-08-28SUBSTRATE DRYING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING SAME
#3 | 2025-03-20SUBSTRATE PROCESSING APPARATUS USING SUPERCRITICAL FLUID AND DRIVING METHOD THEREOF
#4 | 2023-10-26MULTI-CHAMBER APPARATUS
#5 | 2023-08-10Wafer cleaning apparatus and wafer cleaning method using the same
#6 | 2023-06-22Apparatus and method for treating substrate including process chambers and transfer chamber
#7 | 2023-05-18Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device
#8 | 2023-04-27SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
#9 | 2023-04-27SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
#10 | 2022-08-18Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device
#11 | 2022-06-16Substrate drying apparatus and semiconductor device manufacturing method using same
#12 | 2022-04-21Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device
#13 | 2022-03-17Wafer cleaning apparatus and wafer cleaning method using the same
#14 | 2021-07-15Substrate processing apparatus and apparatus for manufacturing integrated circuit device
#15 | 2021-03-04Wafer cleaning apparatus and wafer cleaning method using the same
#16 | 2020-10-29Multi-chamber apparatus
#17 | 2020-10-22Wafer cleaning equipment
#18 | 2020-09-10Method of removing chemicals from a substrate
#19 | 2019-01-17Method of treating substrates using supercritical fluids
#20 | 2018-12-13Substrate processing apparatus and apparatus for manufacturing integrated circuit device
#21 | 2018-11-22Chemical liquid supply apparatus and semiconductor processing apparatus having the same
#22 | 2018-11-01Spot heater and device for cleaning wafer using the same
#23 | 2018-04-26WAFER BOAT ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#24 | 2018-02-01Source supplier for a supercritical fluid, substrate processing apparatus having the same
#25 | 2017-01-12Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same
#26 | 2016-03-10Spot heater and device for cleaning wafer using the same
#27 | 2015-10-22Cleaning solution composition and method of cleaning semiconductor device using the same
#28 | 2015-06-25Sealing member and substrate processing apparatus including the same
#29 | 2015-06-11Apparatus for treating wafers using supercritical fluid
#30 | 2015-06-04NOZZLE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME
#31 | 2014-09-25SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM FOR PERFORMING THE SAME
#32 | 2012-06-21Substrate processing method and substrate processing system for performing the same
#33 | 2012-05-10Integrated circuit capacitors having sidewall supports
#34 | 2012-04-05Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit
#35 | 2012-04-05Apparatus For Drying Substrate
#36 | 2012-03-15SUBSTRATE TREATMENT EQUIPMENT AND METHOD OF TREATING SUBSTRATE USING THE SAME
#37 | 2012-03-15METHODS OF FORMING A CAPACITOR STRUCTURE AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
#38 | 2011-12-15Method for Fabricating Semiconductor Device
#39 | 2011-12-15Methods of Manufacturing Semiconductor Devices
#40 | 2011-11-24METHODS OF FORMING A PATTERN, METHODS OF FORMING A GATE STRUCTURE AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
#41 | 2011-11-17Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer
#42 | 2011-09-08Method of manufacturing a semiconductor device using an etchant
#43 | 2011-08-18Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole
#44 | 2011-06-30Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby
#45 | 2011-03-31Vertical-type semiconductor device
#46 | 2010-10-21Method of manufacturing semiconductor device
#47 | 2009-05-28Method of forming a spacer
#48 | 2009-05-07Cleaning solution for immersion photolithography system and immersion photolithograph process using the cleaning solution
#49 | 2008-06-12Method of removing photoresist and method of manufacturing a semiconductor device
#50 | 2008-01-17Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same
#51 | 2007-11-15Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers
#52 | 2007-10-18CLEANING SOLUTION AND METHOD FOR SELECTIVELY REMOVING LAYER IN A SILICIDATION PROCESS
#53 | 2007-09-04Cleaning solution and method for selectively removing layer in a silicidation process
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