Aachen
Germany
6
2018-08-09
The entities that hold a legal rights for patent applications filed by inventor Silva Hugo:
Hugo Silva from Aachen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for controlling the substrate temperature using a plurality of flushing gases
#2 | 2017-01-05Heating device
#3 | 2016-11-17APPARATUS AND METHOD FOR REGULATING THE TEMPERATURE IN A PROCESS CHAMBER OF A CVD REACTOR USING TWO TEMPERATURE SENSOR DEVICES
#4 | 2015-02-19Method for forming TiSiN thin film layer by using atomic layer deposition
#5 | 2015-01-08Gas inlet member of a CVD reactor
#6 | 2014-09-25CVD REACTOR AND SUBSTRATE HOLDER FOR A CVD REACTOR
912055 ⎘