Herzogenrath
Germany
75
2024-05-09
72
2025-06-10
These are the the leading inventors for applications assigned to AIXTRON SE:
AIXTRON SE based in Herzogenrath, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES
#2 | 2023-11-30 ✅ Patent 12,584,222 granted on 2026-03-24METHODS FOR THERMAL TREATMENT OF SUBSTRATES
#3 | 2023-11-23 ✅ Patent 12,398,466 granted on 2025-08-26METHOD FOR EMISSIVITY-CORRECTED PYROMETRY
#4 | 2023-11-09 ✅ Patent 12,084,768 granted on 2024-09-10Method for using shield plate in a CVD reactor
#5 | 2023-09-21 ✅ Patent 12,577,674 granted on 2026-03-17METHOD FOR IDENTIFYING SUBSTRATES WHICH ARE FAULTY OR HAVE BEEN INCORRECTLY INSERTED INTO A CVD REACTOR
#6 | 2023-02-09 ✅ Patent 12,320,002 granted on 2025-06-03CVD reactor and method for controlling the surface temperature of the substrates
#7 | 2022-08-18 ✅ Patent 12,084,767 granted on 2024-09-10Gas-inlet element for a CVD reactor
#8 | 2022-06-16 ✅ Patent 12,435,422 granted on 2025-10-07METHOD FOR RECORDING A STATE OF A CVD REACTOR UNDER PRODUCTION CONDITIONS
#9 | 2022-06-16 ✅ Patent 12,110,591 granted on 2024-10-08Susceptor arrangement of a CVD reactor
#10 | 2022-04-07 ✅ Patent 12,577,670 granted on 2026-03-17CVD REACTOR HAVING MEANS FOR LOCALLY INFLUENCING THE SUSCEPTOR TEMPERATURE
#11 | 2022-03-10 ✅ Patent 12,305,282 granted on 2025-05-20Susceptor of a CVD reactor
#12 | 2022-02-17 ✅ Patent 11,887,848 granted on 2024-01-30Nucleation layer deposition method
#13 | 2022-02-03 ✅ Patent 12,098,462 granted on 2024-09-24Method for producing a component part of a CVD reactor
#14 | 2022-01-06 ✅ Patent 11,746,419 granted on 2023-09-05Shield plate for a CVD reactor
#15 | 2021-10-07 ✅ Patent 11,713,505 granted on 2023-08-01Device and method for controlling the ceiling temperature of a CVD reactor
#16 | 2021-08-26 ✅ Patent 12,359,319 granted on 2025-07-15ARRANGEMENT FOR MEASURING THE SURFACE TEMPERATURE OF A SUSCEPTOR IN A CVD REACTOR
#17 | 2021-08-19 ✅ Patent 12,180,590 granted on 2024-12-31Cover plate for covering the susceptor side facing the process chamber of a device for depositing SiC layers
#18 | 2021-08-05 ✅ Patent 12,234,553 granted on 2025-02-25CVD reactor with carrying ring for substrate handling, and use of a carrying ring on a CVD reactor
#19 | 2021-06-24 ✅ Patent 12,012,654 granted on 2024-06-18Device for coating a substrate with a carbon-containing coating
#20 | 2021-03-11 ✅ Patent 11,669,072 granted on 2023-06-06Device and method for obtaining information about layers deposited in a CVD method
#21 | 2021-02-04 ✅ Patent 11,959,190 granted on 2024-04-16Device for connecting a susceptor to a drive shaft
#22 | 2020-10-08 ✅ Patent 11,702,740 granted on 2023-07-18Closure element for closing a loading opening of an inner housing of a CVD reactor
#23 | 2020-05-14 ✅ Patent 11,441,223 granted on 2022-09-13Susceptor for a CVD reactor
#24 | 2020-04-23 ✅ Patent 11,851,762 granted on 2023-12-26Coating device having coated transmitter coil
#25 | 2020-02-27 ✅ Patent 11,052,486 granted on 2021-07-06Method and apparatus for producing a structure seed layer using a laser beam
#26 | 2020-01-30 ✅ Patent 11,187,676 granted on 2021-11-30Device and method for determining the concentration of a vapor
#27 | 2020-01-30 ✅ Patent 11,268,934 granted on 2022-03-08Device and method for determining the concentration of a vapor
#28 | 2020-01-09 ✅ Patent 11,479,851 granted on 2022-10-25Substrate holder arrangement with mask support
#29 | 2020-01-09 ✅ Patent 11,396,697 granted on 2022-07-26Device for separating a structured layer on a substrate, and method for setting up the device
#30 | 2019-08-29 ✅ Patent 11,286,566 granted on 2022-03-29Apparatus for deposition of a III-V semiconductor layer
#31 | 2019-07-25 ✅ Patent 10,734,584 granted on 2020-08-04Coating device and coating method
#32 | 2019-07-25 ✅ Patent 10,883,171 granted on 2021-01-05CVD reactor and method for cleaning a CVD reactor
#33 | 2019-06-27 ✅ Patent 11,168,410 granted on 2021-11-09Susceptor for a chemical vapour deposition reactor
#34 | 2019-02-28 ✅ Patent 10,544,519 granted on 2020-01-28Method and apparatus for surface preparation prior to epitaxial deposition
#35 | 2018-09-20 ✅ Patent 10,472,718 granted on 2019-11-12Temperature-controlled gas supply line with dilution gas flows supplied at multiple locations
#36 | 2018-08-09 ✅ Patent 10,526,705 granted on 2020-01-07Methods for controlling the substrate temperature using a plurality of flushing gases
#37 | 2018-07-19 ✅ Patent 10,526,708 granted on 2020-01-07Methods for forming thin protective and optical layers on substrates
#38 | 2018-05-31 ✅ Patent 10,501,847 granted on 2019-12-10Apparatus and method for generating a vapor for a CVD or PVD device
#39 | 2017-11-02 ✅ Patent 10,822,701 granted on 2020-11-03CVD or PVD reactor for coating large-area substrates
#40 | 2017-11-02 ✅ Patent 10,563,300 granted on 2020-02-18Method for separating a carbon structure from a seed structure
#41 | 2017-10-12 ✅ Patent 10,096,473 granted on 2018-10-09Formation of a layer on a semiconductor substrate
#42 | 2017-10-05 ✅ Patent 10,294,562 granted on 2019-05-21Exhaust manifold in a CVD reactor
#43 | 2017-09-14 ✅ Patent 9,988,712 granted on 2018-06-05Substrate holding device
#44 | 2017-08-01 ✅ Patent 9,721,759 granted on 2017-08-01System and method for distributing RF power to a plasma source
#45 | 2017-06-01 ✅ Patent 11,053,586 granted on 2021-07-06Coated flat component in a CVD reactor
#46 | 2017-05-04TRANSFER MODULE FOR A MULTI-MODULE APPARATUS
#47 | 2017-04-27 ✅ Patent 10,060,022 granted on 2018-08-28Device and method for generating a vapor for a CVD or PVD device from multiple liquid or solid source materials
#48 | 2017-04-20 ✅ Patent 10,260,147 granted on 2019-04-16Device for depositing nanotubes
#49 | 2017-01-19 ✅ Patent 10,267,768 granted on 2019-04-23Device and method for determining the concentration of a vapor by means of an oscillating body sensor
#50 | 2017-01-05 ✅ Patent 10,273,580 granted on 2019-04-30Heating device
#51 | 2016-11-10 ✅ Patent 10,323,322 granted on 2019-06-18Gas inlet element of a CVD reactor with weight-reduced gas outlet plate
#52 | 2016-08-04 ✅ Patent 9,793,104 granted on 2017-10-17Preparing a semiconductor surface for epitaxial deposition
#53 | 2016-07-14 ✅ Patent 10,438,823 granted on 2019-10-08Substrate treatment device
#54 | 2016-06-16 ✅ Patent 10,316,408 granted on 2019-06-11Delivery device, manufacturing system and process of manufacturing
#55 | 2016-04-21 ✅ Patent 9,831,466 granted on 2017-11-28Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier
#56 | 2016-03-17 ✅ Patent 9,847,241 granted on 2017-12-19Transport module for a semiconductor fabrication device or coupling device
#57 | 2016-03-17 ✅ Patent 9,670,580 granted on 2017-06-06MOCVD layer growth method with subsequent multi-stage cleaning step
#58 | 2016-01-07 ✅ Patent 9,942,946 granted on 2018-04-10Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus
#59 | 2015-11-12 ✅ Patent 9,970,106 granted on 2018-05-15CVD system having particle separator
#60 | 2015-10-15 ✅ Patent 10,329,668 granted on 2019-06-25Device and method for exhaust gas treatment on CVD reactor
#61 | 2015-09-24 ✅ Patent 9,443,702 granted on 2016-09-13Methods for plasma processing
#62 | 2015-06-04 ✅ Patent 9,564,329 granted on 2017-02-07Method and apparatus for fabricating dielectric structures
#63 | 2015-05-21 ✅ Patent 9,822,451 granted on 2017-11-21Device and method for manufacturing nanostructures consisting of carbon
#64 | 2015-02-19 ✅ Patent 9,159,608 granted on 2015-10-13Method for forming TiSiN thin film layer by using atomic layer deposition
#65 | 2015-01-08 ✅ Patent 9,587,312 granted on 2017-03-07Gas inlet member of a CVD reactor
#66 | 2014-08-21 ✅ Patent 10,221,482 granted on 2019-03-05Gas distributor for a CVD reactor
#67 | 2014-07-03Device and method for processing strip-type substrates
#68 | 2013-02-14COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A SHIELDING PLATE
#69 | 2012-08-16 ✅ Patent 9,447,500 granted on 2016-09-20CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones
#70 | 2012-06-14 ✅ Patent 9,018,105 granted on 2015-04-28CVD method and CVD reactor
#71 | 2012-04-19 ✅ Patent 8,846,501 granted on 2014-09-30Method for equipping an epitaxy reactor
#72 | 2011-12-01 ✅ Patent 8,841,221 granted on 2014-09-23MOCVD reactor having cylindrical gas inlet element
#73 | 2011-07-21 ✅ Patent 9,045,818 granted on 2015-06-02Shadow mask held magnetically on a substrate support
#74 | 2011-01-13 ✅ Patent 10,049,859 granted on 2018-08-14Plasma generating units for processing a substrate
#75 | 2009-01-15 ✅ Patent 8,349,081 granted on 2013-01-08Gas distributor with pre-chambers arranged in planes
Also check out AIXTRON SE's (Herzogenrath, Germany) applicant profile with 74 patent applications submitted.
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