Pleasanton, California
United States
11
2019-11-21
The entities that hold a legal rights for patent applications filed by inventor Danen Robert M.:
Robert M. Danen from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Phase filter for enhanced defect detection in multilayer structure
#2 | 2019-08-22Determining information for defects on wafers
#3 | 2018-05-31Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures
#4 | 2018-04-12Three-dimensional imaging for semiconductor wafer inspection
#5 | 2017-10-26Apparatus and methods for finding a best aperture and mode to enhance defect detection
#6 | 2016-09-15Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
#7 | 2015-05-07Determining information for defects on wafers
#8 | 2015-01-15Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
#9 | 2014-12-04Apparatus and methods for finding a best aperture and mode to enhance defect detection
#10 | 2014-10-09Apparatus and methods for determining defect depths in vertical stack memory
#11 | 2012-05-10Optical defect amplification for improved sensitivity on patterned layers
928147 ⎘