Milpitas, California
United States
158
2020-08-20
158
2021-02-16
These are the the leading inventors for applications assigned to KLA-Tencor Corp.:
KLA-Tencor Corp. based in Milpitas, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
File selection for test image to design alignment
#2 | 2020-04-23 ✅ Patent 10,832,396 granted on 2020-11-10And noise based care areas
#3 | 2020-03-05 ✅ Patent 11,067,516 granted on 2021-07-20High accuracy of relative defect locations for repeater analysis
#4 | 2019-12-05 ✅ Patent 10,713,769 granted on 2020-07-14Active learning for defect classifier training
#5 | 2019-11-14 ✅ Patent 10,620,134 granted on 2020-04-14Creating defect samples for array regions
#6 | 2019-10-17 ✅ Patent 10,714,366 granted on 2020-07-14Shape metric based scoring of wafer locations
#7 | 2019-10-03 ✅ Patent 10,599,951 granted on 2020-03-24Training a neural network for defect detection in low resolution images
#8 | 2019-10-03 ✅ Patent 10,670,536 granted on 2020-06-02Mode selection for inspection
#9 | 2019-09-26 ✅ Patent 10,621,718 granted on 2020-04-14Aided image reconstruction
#10 | 2019-09-26 ✅ Patent 11,170,255 granted on 2021-11-09Training a machine learning model with synthetic images
#11 | 2019-09-12 ✅ Patent 10,818,005 granted on 2020-10-27Previous layer nuisance reduction through oblique illumination
#12 | 2019-09-12 ✅ Patent 10,677,742 granted on 2020-06-09Detecting die repeating programmed defects located in backgrounds with non-repeating features
#13 | 2019-08-22 ✅ Patent 10,571,407 granted on 2020-02-25Determining information for defects on wafers
#14 | 2019-07-04 ✅ Patent 10,670,535 granted on 2020-06-02Automated pattern fidelity measurement plan generation
#15 | 2019-03-07 ✅ Patent 10,607,119 granted on 2020-03-31Unified neural network for defect detection and classification
#16 | 2019-03-07 ✅ Patent 10,713,534 granted on 2020-07-14Training a learning based defect classifier
#17 | 2019-02-28 ✅ Patent 10,699,926 granted on 2020-06-30Identifying nuisances and defects of interest in defects detected on a wafer
#18 | 2019-01-24 ✅ Patent 10,620,135 granted on 2020-04-14Identifying a source of nuisance defects on a wafer
#19 | 2019-01-03 ✅ Patent 10,769,761 granted on 2020-09-08Generating high resolution images from low resolution images for semiconductor applications
#20 | 2018-12-11 ✅ Patent 10,151,706 granted on 2018-12-11Inspection for specimens with extensive die to die process variation
#21 | 2018-11-15 ✅ Patent 10,733,744 granted on 2020-08-04Learning based approach for aligning images acquired with different modalities
#22 | 2018-11-15 ✅ Patent 10,365,232 granted on 2019-07-30High accuracy of relative defect locations for repeater analysis
#23 | 2018-10-11 ✅ Patent 10,395,362 granted on 2019-08-27Contour based defect detection
#24 | 2018-08-28 ✅ Patent 10,062,012 granted on 2018-08-28Finding patterns in a design based on the patterns and their surroundings
#25 | 2018-06-14 ✅ Patent 10,488,348 granted on 2019-11-26Wafer inspection
#26 | 2018-05-10 ✅ Patent 10,395,358 granted on 2019-08-27High sensitivity repeater defect detection
#27 | 2018-04-26 ✅ Patent 10,332,810 granted on 2019-06-25Process modules integrated into a metrology and/or inspection tool
#28 | 2018-04-19 ✅ Patent 10,267,748 granted on 2019-04-23Optimizing training sets used for setting up inspection-related algorithms
#29 | 2018-02-22 ✅ Patent 10,416,088 granted on 2019-09-17Virtual inspection systems with multiple modes
#30 | 2017-12-07 ✅ Patent 10,346,740 granted on 2019-07-09Systems and methods incorporating a neural network and a forward physical model for semiconductor applications
#31 | 2017-11-30 ✅ Patent 10,395,356 granted on 2019-08-27Generating simulated images from input images for semiconductor applications
#32 | 2017-10-12 ✅ Patent 10,215,713 granted on 2019-02-26Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
#33 | 2017-10-05 ✅ Patent 10,395,359 granted on 2019-08-27Adaptive local threshold and color filtering
#34 | 2017-07-25 ✅ Patent 9,714,905 granted on 2017-07-25Wafer inspection recipe setup
#35 | 2017-07-13 ✅ Patent 10,043,261 granted on 2018-08-07Generating simulated output for a specimen
#36 | 2017-07-13 ✅ Patent 10,181,185 granted on 2019-01-15Image based specimen process control
#37 | 2017-07-13 ✅ Patent 10,360,477 granted on 2019-07-23Accelerating semiconductor-related computations using learning based models
#38 | 2017-07-11 ✅ Patent 9,702,827 granted on 2017-07-11Optical mode analysis with design-based care areas
#39 | 2017-07-06 ✅ Patent 9,916,965 granted on 2018-03-13Hybrid inspectors
#40 | 2017-07-06 ✅ Patent 10,648,924 granted on 2020-05-12Generating high resolution images from low resolution images for semiconductor applications
#41 | 2017-07-06 ✅ Patent 11,580,375 granted on 2023-02-14Accelerated training of a machine learning based model for semiconductor applications
#42 | 2017-07-06 ✅ Patent 9,915,625 granted on 2018-03-13Optical die to database inspection
#43 | 2017-05-25 ✅ Patent 9,965,901 granted on 2018-05-08Generating simulated images from design information
#44 | 2017-05-18 ✅ Patent 10,186,026 granted on 2019-01-22Single image detection
#45 | 2017-05-09 ✅ Patent 9,646,379 granted on 2017-05-09Detection of selected defects in relatively noisy inspection data
#46 | 2017-03-30 ✅ Patent 9,846,930 granted on 2017-12-19Detecting defects on a wafer using defect-specific and multi-channel information
#47 | 2017-03-02 ✅ Patent 10,359,371 granted on 2019-07-23Determining one or more characteristics of a pattern of interest on a specimen
#48 | 2017-02-16 ✅ Patent 10,211,025 granted on 2019-02-19Determining a position of a defect in an electron beam image
#49 | 2016-12-29 ✅ Patent 10,062,543 granted on 2018-08-28Determining multi-patterning step overlay error
#50 | 2016-12-22 ✅ Patent 10,483,081 granted on 2019-11-19Self directed metrology and pattern classification
#51 | 2016-11-03 ✅ Patent 10,393,671 granted on 2019-08-27Intra-die defect detection
#52 | 2016-10-27 ✅ Patent 9,767,548 granted on 2017-09-19Outlier detection on pattern of interest image populations
#53 | 2016-10-06 ✅ Patent 9,875,536 granted on 2018-01-23Sub-pixel and sub-resolution localization of defects on patterned wafers
#54 | 2016-10-06 ✅ Patent 10,012,599 granted on 2018-07-03Optical die to database inspection
#55 | 2016-09-22 ✅ Patent 9,996,942 granted on 2018-06-12Sub-pixel alignment of inspection to design
#56 | 2016-09-22 ✅ Patent 9,891,538 granted on 2018-02-13Adaptive sampling for process window determination
#57 | 2016-09-08 ✅ Patent 9,835,566 granted on 2017-12-05Adaptive nuisance filter
#58 | 2016-08-04 ✅ Patent 9,563,943 granted on 2017-02-07Based sampling and binning for yield critical defects
#59 | 2016-06-30 ✅ Patent 9,830,421 granted on 2017-11-28Alignment of inspection to design using built in targets
#60 | 2016-06-09 ✅ Patent 10,014,229 granted on 2018-07-03Generating a wafer inspection process using bit failures and virtual inspection
#61 | 2016-06-09 ✅ Patent 9,625,726 granted on 2017-04-18Lens array-based illumination for wafer inspection
#62 | 2016-05-31 ✅ Patent 9,355,440 granted on 2016-05-31Detection of selected defects in relatively noisy inspection data
#63 | 2016-05-26 ✅ Patent 10,402,461 granted on 2019-09-03Virtual inspection systems for process window characterization
#64 | 2016-05-05 ✅ Patent 9,518,934 granted on 2016-12-13Wafer defect discovery
#65 | 2016-04-28 ✅ Patent 10,267,746 granted on 2019-04-23Automated pattern fidelity measurement plan generation
#66 | 2016-04-21 ✅ Patent 9,582,869 granted on 2017-02-28Dynamic binning for diversification and defect discovery
#67 | 2016-04-14 ✅ Patent 9,727,047 granted on 2017-08-08Defect detection using structural information
#68 | 2016-03-31 ✅ Patent 9,778,207 granted on 2017-10-03Integrated multi-pass inspection
#69 | 2016-03-10 ✅ Patent 9,721,337 granted on 2017-08-01Detecting defects on a wafer using defect-specific information
#70 | 2016-03-03 ✅ Patent 9,766,186 granted on 2017-09-19Array mode repeater detection
#71 | 2016-03-03 ✅ Patent 9,766,187 granted on 2017-09-19Repeater detection
#72 | 2016-02-04 ✅ Patent 10,712,289 granted on 2020-07-14Inspection for multiple process steps in a single inspection process
#73 | 2016-01-28 ✅ Patent 9,552,636 granted on 2017-01-24Detecting defects on a wafer using defect-specific and multi-channel information
#74 | 2016-01-28 ✅ Patent 10,127,653 granted on 2018-11-13Determining coordinates for an area of interest on a specimen
#75 | 2016-01-28 ✅ Patent 9,816,939 granted on 2017-11-14Virtual inspection systems with multiple modes
#76 | 2015-12-31 ✅ Patent 9,709,510 granted on 2017-07-18Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
#77 | 2015-12-24 ✅ Patent 9,915,622 granted on 2018-03-13Wafer inspection
#78 | 2015-12-17 ✅ Patent 9,400,865 granted on 2016-07-26Extracting comprehensive design guidance for in-line process control tools and methods
#79 | 2015-12-17 ✅ Patent 10,514,685 granted on 2019-12-24Automatic recipe stability monitoring and reporting
#80 | 2015-11-19 ✅ Patent 9,377,416 granted on 2016-06-28Wafer edge detection and inspection
#81 | 2015-11-19 ✅ Patent 9,535,010 granted on 2017-01-03Defect sampling for electron beam review based on defect attributes from optical inspection and optical review
#82 | 2015-11-12 ✅ Patent 9,401,016 granted on 2016-07-26Using high resolution full die image data for inspection
#83 | 2015-11-12 ✅ Patent 9,262,821 granted on 2016-02-16Inspection recipe setup from reference image variation
#84 | 2015-11-12 ✅ Patent 9,478,019 granted on 2016-10-25Reticle inspection using near-field recovery
#85 | 2015-10-15 ✅ Patent 9,506,873 granted on 2016-11-29Pattern suppression in logic for wafer inspection
#86 | 2015-10-01 ✅ Patent 10,338,004 granted on 2019-07-02Production sample shaping that preserves re-normalizability
#87 | 2015-09-17 ✅ Patent 9,613,411 granted on 2017-04-04Creating defect classifiers and nuisance filters
#88 | 2015-09-10 ✅ Patent 9,430,743 granted on 2016-08-30Composite defect classifier
#89 | 2015-08-06 ✅ Patent 10,127,652 granted on 2018-11-13Defect detection and classification based on attributes determined from a standard reference image
#90 | 2015-07-16 ✅ Patent 9,536,299 granted on 2017-01-03Pattern failure discovery by leveraging nominal characteristics of alternating failure modes
#91 | 2015-06-25 ✅ Patent 9,293,298 granted on 2016-03-22Defect discovery and inspection sensitivity optimization using automated classification of corresponding electron beam images
#92 | 2015-06-25 ✅ Patent 9,715,725 granted on 2017-07-25Context-based inspection for dark field inspection
#93 | 2015-05-07 ✅ Patent 9,489,599 granted on 2016-11-08Decision tree construction for automatic classification of defects on semiconductor wafers
#94 | 2015-05-07 ✅ Patent 9,518,932 granted on 2016-12-13Metrology optimized inspection
#95 | 2015-05-07 ✅ Patent 10,317,347 granted on 2019-06-11Determining information for defects on wafers
#96 | 2015-04-16 ✅ Patent 9,291,575 granted on 2016-03-22Wafer inspection
#97 | 2015-03-05 ✅ Patent 9,442,077 granted on 2016-09-13Scratch filter for wafer inspection
#98 | 2015-03-05 ✅ Patent 9,224,660 granted on 2015-12-29Tuning wafer inspection recipes using precise defect locations
#99 | 2015-02-12 ✅ Patent 9,704,234 granted on 2017-07-11Adaptive local threshold and color filtering
#100 | 2015-02-12 ✅ Patent 9,347,862 granted on 2016-05-24Setting up a wafer inspection process using programmed defects
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