Sendai
Japan
3
2014-10-09
The entities that hold a legal rights for patent applications filed by inventor UEDA Hirokazu:
Hirokazu UEDA from Sendai, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Pulsed gas plasma doping method and apparatus
#2 | 2013-11-07Method for fabricating semiconductor device and the semiconductor device
#3 | 2011-03-31Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device
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