Kalispell, Montana
United States
9
2024-02-08
The entities that hold a legal rights for patent applications filed by inventor Wirth Paul:
Paul Wirth from Kalispell, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Servo-control system
#2 | 2023-01-26Servo-control system
#3 | 2022-03-17Mass flow control based on micro-electromechanical devices
#4 | 2021-08-26Methods of use of a servo control system
#5 | 2021-01-28Walking beam chamber
#6 | 2018-10-18Microelectronic substrate electro processing system
#7 | 2016-10-13Microelectronic substrate electro processing system
#8 | 2015-03-12Anneal module for semiconductor wafers
#9 | 2014-10-30Microelectronic substrate electro processing system
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