Milpitas, California
United States
30
2015-07-02
The entities that hold a legal rights for patent applications filed by inventor Tsung James:
James Tsung from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Systems and Methods for Parallel Combinatorial Vapor Deposition Processing
#2 | 2015-06-25Multipurpose combinatorial vapor phase deposition chamber
#3 | 2015-06-25Interchangeable sputter gun head
#4 | 2015-06-18High productivity combinatorial processing using pressure-controlled one-way valves
#5 | 2015-04-02Combinatorial Process System
#6 | 2014-10-30Method and System for Isolated and Discretized Process Sequence Integration
#7 | 2014-10-23Multi-Region Processing System and Heads
#8 | 2014-09-18Controlling Radical Lifetimes in a Remote Plasma Chamber
#9 | 2014-07-03Methods and Systems for Site-Isolated Combinatorial Substrate Processing Using a Mask
#10 | 2014-06-26High Deposition Rate Chamber with Co-Sputtering Capabilities
#11 | 2014-06-19Substrate Carrier
#12 | 2013-07-16Method and apparatus for variable conductance
#13 | 2013-07-04Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing
#14 | 2013-06-20Substrate Processing Tool with Tunable Fluid Flow
#15 | 2013-06-13Combinatorial RF bias method for PVD
#16 | 2013-02-21Method and system for mask handling in high productivity chamber
#17 | 2012-12-20Method and system for isolated and discretized process sequence integration
#18 | 2012-07-10Method and apparatus for variable conductance
#19 | 2012-06-14Combinatorial process system
#20 | 2012-06-07Combinatorial process system
#21 | 2011-10-27Method and system for mask handling in high productivity chamber
#22 | 2011-09-01Multi-region processing system
#23 | 2011-03-17Method and system for isolated and discretized process sequence integration
#24 | 2009-03-12Combinatorial process system
#25 | 2009-03-12Multi-region processing system and heads
#26 | 2009-03-05Combinatorial process system
#27 | 2009-03-05Combinatorial process system
#28 | 2008-12-04Method and system for mask handling in high productivity chamber
#29 | 2008-01-24Method and system for isolated and discretized process sequence integration
#30 | 2008-01-24Method and system for isolated and discretized process sequence integration
95774 ⎘