Inventor profile of:

James Tsung

City:

Milpitas, California

Country:

United States

Published Applications:

30

Last publication date:

2015-07-02

Top Assignees for applications by James Tsung

The entities that hold a legal rights for patent applications filed by inventor Tsung James:

Recent patent applications by Tsung James

James Tsung from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-07-02
US20150184287A1
Chemistry; metallurgy

Systems and Methods for Parallel Combinatorial Vapor Deposition Processing

#2 | 2015-06-25
US20150179487A1
Electricity

Multipurpose combinatorial vapor phase deposition chamber

#3 | 2015-06-25
US20150176117A1
Chemistry; metallurgy

Interchangeable sputter gun head

#4 | 2015-06-18
US20150170908A1
Electricity

High productivity combinatorial processing using pressure-controlled one-way valves

#5 | 2015-04-02
US20150093898A1
Electricity

Combinatorial Process System

#6 | 2014-10-30
US20140318450A1
Chemistry; metallurgy

Method and System for Isolated and Discretized Process Sequence Integration

#7 | 2014-10-23
US20140311408A1
Chemistry; metallurgy

Multi-Region Processing System and Heads

#8 | 2014-09-18
US20140273309A1
Electricity

Controlling Radical Lifetimes in a Remote Plasma Chamber

#9 | 2014-07-03
US20140183161A1
Chemistry; metallurgy

Methods and Systems for Site-Isolated Combinatorial Substrate Processing Using a Mask

#10 | 2014-06-26
US20140174907A1
Chemistry; metallurgy

High Deposition Rate Chamber with Co-Sputtering Capabilities

#11 | 2014-06-19
US20140166840A1
Electricity

Substrate Carrier

#12 | 2013-07-16
US13489312
-

Method and apparatus for variable conductance

#13 | 2013-07-04
US20130168231A1
Electricity

Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing

#14 | 2013-06-20
US20130153149A1
Chemistry; metallurgy

Substrate Processing Tool with Tunable Fluid Flow

#15 | 2013-06-13
US20130149469A1
Chemistry; metallurgy

Combinatorial RF bias method for PVD

#16 | 2013-02-21
US20130042810A1
Electricity

Method and system for mask handling in high productivity chamber

#17 | 2012-12-20
US20120322173A1
Chemistry; metallurgy

Method and system for isolated and discretized process sequence integration

#18 | 2012-07-10
US12354679
-

Method and apparatus for variable conductance

#19 | 2012-06-14
US20120149180A1
Electricity

Combinatorial process system

#20 | 2012-06-07
US20120142197A1
Electricity

Combinatorial process system

#21 | 2011-10-27
US20110262644A1
Electricity

Method and system for mask handling in high productivity chamber

#22 | 2011-09-01
US20110209663A1
Chemistry; metallurgy

Multi-region processing system

#23 | 2011-03-17
US20110065284A1
Chemistry; metallurgy

Method and system for isolated and discretized process sequence integration

#24 | 2009-03-12
US20090069924A1
Electricity

Combinatorial process system

#25 | 2009-03-12
US20090068849A1
Chemistry; metallurgy

Multi-region processing system and heads

#26 | 2009-03-05
US20090061108A1
Electricity

Combinatorial process system

#27 | 2009-03-05
US20090061087A1
Electricity

Combinatorial process system

#28 | 2008-12-04
US20080295962A1
Electricity

Method and system for mask handling in high productivity chamber

#29 | 2008-01-24
US20080020589A1
Chemistry; metallurgy

Method and system for isolated and discretized process sequence integration

#30 | 2008-01-24
US20080017109A1
Chemistry; metallurgy

Method and system for isolated and discretized process sequence integration

InventorID:

95774 ⎘