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Inventor profile of:

Hitoshi KATO

City:

Iwate

Country:

Japan

Published Applications:

108

Last publication date:

2026-04-16

Top Assignees for applications by Hitoshi KATO

The entities that hold a legal rights for patent applications filed by inventor KATO Hitoshi:

TOKYO ELECTRON LIMITED 82 Tokyo, Japan
Semiconductor Leading Edge Technologies, Inc. 2 Tsukuba-shi, Japan
TOKYO ELECTRON LIMIIED 1 Tokyo, Japan

Recent patent applications by KATO Hitoshi

Hitoshi KATO from Iwate, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-16

US20260107708A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#2 | 2026-04-16

US20260107707A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#3 | 2026-04-16

US20260103793A1

Chemistry; metallurgy

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#4 | 2025-04-24

US20250129482A1

Chemistry; metallurgy

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

#5 | 2025-04-24

US20250129479A1

Chemistry; metallurgy

FILM-FORMING METHOD AND FILM-FORMING SYSTEM

#6 | 2025-04-24

US20250129472A1

Chemistry; metallurgy

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

#7 | 2025-04-24

US20250128298A1

Performing operations; transporting

CLEANING METHOD AND FILM-FORMING APPARATUS

#8 | 2024-12-05

US20240404795A1

Electricity

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

#9 | 2024-12-05

US20240401199A1

Chemistry; metallurgy

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#10 | 2024-12-05

US20240401198A1

Chemistry; metallurgy

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

#11 | 2024-10-17

US20240347351A1

Electricity

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

#12 | 2024-09-12

US20240304416A1

Electricity

ANTENNA AND PLASMA PROCESSING APPARATUS

#13 | 2024-03-07

US20240076777A1

Chemistry; metallurgy

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#14 | 2023-08-03

US20230245858A1

Electricity

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

#15 | 2023-07-20

US20230230817A1

Electricity

DEPOSITION METHOD AND DEPOSITION APPARATUS

#16 | 2022-10-20

US20220336190A1

Electricity

Plasma generation apparatus, deposition apparatus using the same, and deposition method

#17 | 2022-07-21

US20220230852A1

Electricity

Plasma processing apparatus

#18 | 2022-07-14

US20220223463A1

Electricity

DEPOSITION APPARATUS AND DEPOSITION METHOD

#19 | 2022-07-14

US20220223408A1

Electricity

Method for depositing film and film deposition system

#20 | 2022-07-14

US20220223375A1

Electricity

ANTENNA AND PLASMA PROCESSING APPARATUS

#21 | 2021-08-12

US20210249265A1

Electricity

Deposition method and deposition apparatus

#22 | 2021-08-12

US20210249264A1

Electricity

Film forming method and film forming apparatus

#23 | 2021-08-12

US20210249235A1

Electricity

Substrate holding mechanism and substrate processing apparatus

#24 | 2021-08-12

US20210246550A1

Chemistry; metallurgy

Film deposition apparatus and film deposition method

#25 | 2021-03-25

US20210087684A1

Chemistry; metallurgy

DEPOSITION APPARATUS AND DEPOSITION METHOD

#26 | 2020-07-23

US20200234997A1

Electricity

Substrate processing method

#27 | 2020-05-07

US20200141001A1

Chemistry; metallurgy

Cleaning method and film deposition method

#28 | 2020-02-06

US20200040456A1

Chemistry; metallurgy

Film deposition apparatus and film deposition method

#29 | 2020-01-30

US20200032390A1

Chemistry; metallurgy

Method for depositing a silicon nitride film and film deposition apparatus

#30 | 2020-01-16

US20200017968A1

Chemistry; metallurgy

Deposition method

#31 | 2019-12-19

US20190382894A1

Chemistry; metallurgy

Substrate processing apparatus

#32 | 2019-07-04

US20190203355A1

Chemistry; metallurgy

Film formation time setting method

#33 | 2019-06-27

US20190194803A1

Chemistry; metallurgy

SUSCEPTOR CLEANING METHOD

#34 | 2019-06-20

US20190186004A1

Chemistry; metallurgy

Film formation apparatus

#35 | 2019-06-06

US20190172700A1

Electricity

Film deposition method of depositing film and film deposition apparatus

#36 | 2019-02-14

US20190051513A1

Electricity

Method for depositing a silicon nitride film and film deposition apparatus

#37 | 2019-02-14

US20190051512A1

Electricity

Method for depositing a silicon nitride film and film deposition apparatus

#38 | 2019-02-14

US20190051511A1

Electricity

Method for depositing a silicon nitride film and film deposition apparatus

#39 | 2018-10-25

US20180308688A1

Electricity

Film deposition method

#40 | 2018-08-30

US20180245218A1

Chemistry; metallurgy

Film forming apparatus

#41 | 2018-08-23

US20180237912A1

Chemistry; metallurgy

Film deposition method and film deposition apparatus

#42 | 2018-03-22

US20180080123A1

Chemistry; metallurgy

Film deposition method and computer program storage medium

#43 | 2018-03-15

US20180073146A1

Chemistry; metallurgy

Antenna Device, Plasma Generating Device Using the Same, and Plasma Processing Apparatus

#44 | 2018-02-08

US20180037990A1

Chemistry; metallurgy

Film forming apparatus, method of forming film, and storage medium

#45 | 2018-01-18

US20180019114A1

Electricity

Method for depositing a silicon nitride film

#46 | 2017-09-21

US20170268104A1

Chemistry; metallurgy

Method for processing a substrate and substrate processing apparatus

#47 | 2017-09-07

US20170253964A1

Chemistry; metallurgy

FILM DEPOSITION METHOD

#48 | 2017-08-03

US20170218510A1

Chemistry; metallurgy

Film deposition method

#49 | 2016-09-15

US20160268105A1

Electricity

Plasma processing device and operation method

#50 | 2016-08-25

US20160244877A1

Chemistry; metallurgy

Film deposition apparatus

#51 | 2016-03-03

US20160064246A1

Electricity

Substrate processing apparatus and method of processing a substrate

#52 | 2015-11-19

US20150332895A1

Electricity

Plasma processing method and plasma processing apparatus

#53 | 2015-08-20

US20150235813A1

Electricity

Plasma processing device and operation method

#54 | 2015-08-13

US20150225849A1

Chemistry; metallurgy

Method for processing a substrate and substrate processing apparatus

#55 | 2015-07-02

US20150184294A1

Chemistry; metallurgy

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

#56 | 2015-07-02

US20150184293A1

Chemistry; metallurgy

Film formation method and apparatus for semiconductor process

#57 | 2015-05-14

US20150132505A1

Electricity

Plasma processing apparatus and plasma processing method

#58 | 2015-05-07

US20150126044A1

Chemistry; metallurgy

Substrate processing apparatus and substrate processing method

#59 | 2015-04-30

US20150118415A1

Chemistry; metallurgy

PLASMA PROCESSING APPARATUS AND METHOD OF PERFORMING PLASMA PROCESS

#60 | 2015-01-22

US20150024143A1

Chemistry; metallurgy

Film deposition method for producing a reaction product on a substrate

#61 | 2015-01-01

US20150004332A1

Electricity

Method of depositing a film, recording medium, and film deposition apparatus

#62 | 2014-12-18

US20140370205A1

Chemistry; metallurgy

Film deposition method

#63 | 2014-11-27

US20140349032A1

Chemistry; metallurgy

Film deposition method

#64 | 2014-08-07

US20140220260A1

Chemistry; metallurgy

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM

#65 | 2014-07-31

US20140213068A1

Electricity

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

#66 | 2014-07-17

US20140199856A1

Electricity

METHOD OF DEPOSITING A FILM AND FILM DEPOSITION APPARATUS

#67 | 2014-06-19

US20140170859A1

Electricity

Film formation device, substrate processing device, and film formation method

#68 | 2014-05-08

US20140123895A1

Electricity

PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE

#69 | 2014-04-24

US20140113436A1

Electricity

Method of depositing a film and film deposition apparatus

#70 | 2014-01-23

US20140024200A1

Electricity

Film deposition apparatus and film deposition method

#71 | 2014-01-16

US20140017909A1

Electricity

Film deposition method and film deposition apparatus

#72 | 2014-01-16

US20140017905A1

Electricity

Film deposition apparatus and method of depositing film

#73 | 2014-01-09

US20140011372A1

Electricity

FILM DEPOSITION METHOD

#74 | 2014-01-09

US20140011370A1

Electricity

Method of operating film deposition apparatus and film deposition apparatus

#75 | 2014-01-09

US20140011369A1

Electricity

Film deposition apparatus, and method of depositing a film

#76 | 2013-12-19

US20130337635A1

Electricity

Film deposition apparatus, substrate processing apparatus and film deposition method

#77 | 2013-10-24

US20130276705A1

Chemistry; metallurgy

Substrate processing apparatus

#78 | 2013-09-26

US20130251904A1

Chemistry; metallurgy

FILM DEPOSITION METHOD AND COMPUTER READABLE STORAGE MEDIUM

#79 | 2013-08-15

US20130206067A1

Electricity

FILM DEPOSITION APPARATUS

#80 | 2013-08-08

US20130203268A1

Electricity

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

#81 | 2013-07-25

US20130189849A1

Electricity

Particle reducing method

#82 | 2013-07-18

US20130180452A1

Chemistry; metallurgy

FILM DEPOSITION APPARATUS

#83 | 2013-06-27

US20130164942A1

Electricity

Film deposition method

#84 | 2013-06-13

US20130149467A1

Chemistry; metallurgy

Film deposition apparatus, film deposition method, and computer-readable recording medium

#85 | 2013-05-23

US20130130512A1

Electricity

Film deposition method and film deposition apparatus

#86 | 2013-05-16

US20130122718A1

Electricity

Film deposition apparatus, film deposition method, and storage medium

#87 | 2013-04-11

US20130087097A1

Chemistry; metallurgy

FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS

#88 | 2013-03-07

US20130059415A1

Chemistry; metallurgy

Film deposition apparatus, film deposition method and storage medium

#89 | 2013-02-28

US20130047923A1

Electricity

FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PLASMA GENERATING DEVICE

#90 | 2013-02-21

US20130042813A1

Chemistry; metallurgy

Film deposition apparatus

#91 | 2012-10-25

US20120267341A1

Electricity

Film deposition apparatus and film deposition method

#92 | 2012-09-06

US20120222615A1

Electricity

FILM DEPOSITION APPARATUS

#93 | 2012-04-12

US20120088030A1

Chemistry; metallurgy

FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM

#94 | 2012-03-29

US20120076937A1

Chemistry; metallurgy

FILM DEPOSITION DEVICE AND FILM DEPOSITION METHOD

#95 | 2012-03-01

US20120052693A1

Chemistry; metallurgy

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER PROGRAM STORAGE MEDIUM

#96 | 2011-09-29

US20110236598A1

Chemistry; metallurgy

Film deposition apparatus, film deposition method, and computer readable storage medium

#97 | 2011-09-08

US20110214611A1

Chemistry; metallurgy

Film deposition apparatus

#98 | 2011-06-30

US20110159188A1

Chemistry; metallurgy

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

#99 | 2011-06-30

US20110159187A1

Electricity

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

#100 | 2011-06-30

US20110155062A1

Electricity

FILM DEPOSITION APPARATUS

InventorID:

95778 ⎘