Eindhoven
Netherlands
6
2014-11-13
The entities that hold a legal rights for patent applications filed by inventor COOGANS Martyn John:
Martyn John COOGANS from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#2 | 2014-11-06Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#3 | 2013-05-30Inspection method and apparatus, and corresponding lithographic apparatus
#4 | 2012-02-09Inspection apparatus and method for measuring a property of a substrate
#5 | 2012-01-19Method and apparatus for determining an overlay error
#6 | 2011-05-05Apparatus and method of measuring a property of a substrate
959520 ⎘