Sunnyvale, California
United States
17
2025-11-20
The entities that hold a legal rights for patent applications filed by inventor Choi Tom:
Tom Choi from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
DOPED TUNGSTEN CARBIDE LOW-K ETCH HARD MASK
#2 | 2022-04-28MULTI COLOR STACK FOR SELF ALIGNED DUAL PATTERN FORMATION FOR MULTI PURPOSE DEVICE STRUCTURES
#3 | 2020-05-28Selective removal of silicon-containing materials
#4 | 2020-02-06SYSTEMS AND METHODS FOR MATERIAL BREAKTHROUGH
#5 | 2019-10-10Systems and methods for material breakthrough
#6 | 2019-04-25Atomic layer etching processes
#7 | 2019-01-17Non-halogen etching of silicon-containing materials
#8 | 2018-11-08SiN spacer profile patterning
#9 | 2018-08-09Shaped etch profile with oxidation
#10 | 2018-05-17SiN spacer profile patterning
#11 | 2018-03-15Footing removal for nitride spacer
#12 | 2018-03-15Poly directional etch by oxidation
#13 | 2017-08-24Cyclic oxide spacer etch process
#14 | 2016-10-20SPACER FORMATION PROCESS WITH FLAT TOP PROFILE
#15 | 2016-10-06Cyclic spacer etching process with improved profile control
#16 | 2016-10-06Cyclic spacer etching process with improved profile control
#17 | 2014-11-13Pulsed dielectric etch process for in-situ metal hard mask shape control to enable void-free metallization
968302 ⎘