Ravinder Aggarwal

SELF-CENTERING SUSCEPTOR RING ASSEMBLY

Self-centering susceptor ring assembly

Thermocouple

Reaction apparatus having multiple adjustable exhaust ports

Thermocouple

Substrate reactor with adjustable injectors for mixing gases within reaction chamber

Load lock having secondary isolation chamber

Thermocouple

Self-centering susceptor ring assembly

Substrate support system for reduced autodoping and backside deposition

Susceptor ring

Redundant temperature sensor for semiconductor processing chambers

Calibration of temperature control system for semiconductor processing chamber

Reaction apparatus having multiple adjustable exhaust ports

REACTOR WITH SMALL LINEAR LAMPS FOR LOCALIZED HEAT CONTROL AND IMPROVED TEMPERATURE UNIFORMITY

Substrate handling chamber with movable substrate carrier loading platform

Movable radiant heat sources

Semiconductor wafer cooling device

Semiconductor processing apparatus with multiple exhaust paths

High temperature drop-off of a substrate

Fabrication pathway integrated metrology device

Loadlock with integrated pre-clean chamber

Load port with manual FOUP door opening mechanism

Substrate support system for reduced autodoping and backside deposition

Slit valve for a semiconductor processing system

Two-stage load for processing both sides of a wafer

Semiconductor processing tool front end interface with sealing capability

Non-contact cool-down station for wafers

Front opening unified pod

Non-contact cool-down station for wafers

Slit valve for a semiconductor processing system

Localized heating of substrates using optics