Jiangsu
China
7
2022-12-01
The entities that hold a legal rights for patent applications filed by inventor Xia Changfeng:
Changfeng Xia from Jiangsu, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
MEMS microphone and preparation method therefor
#2 | 2020-07-09METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STRUCTURE
#3 | 2017-05-04Manufacturing method of MEMS chip
#4 | 2015-08-20Parallel plate capacitor and acceleration sensor comprising same
#5 | 2015-06-25METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE
#6 | 2015-06-04MEMS chip and manufacturing method therefor
#7 | 2014-11-27Monitoring structure and monitoring method for silicon wet etching depth
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