Veldhoven
Netherlands
3
2022-07-21
3
2024-09-17
These are the the leading inventors for applications assigned to ASML NETHERLANS B.V.:
ASML NETHERLANS B.V. based in Veldhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method of determining characteristic of patterning process based on defect for reducing hotspot
#2 | 2016-10-13 β Patent 10,175,587 granted on 2019-01-08Lithographic apparatus and device manufacturing method
#3 | 2009-08-27 β Patent 8,100,684 granted on 2012-01-24Imprint lithography
114332 β