Eindhoven
Netherlands
85
2020-07-16
The entities that hold a legal rights for patent applications filed by inventor Simon Klaus:
Klaus Simon from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2019-10-03Lithographic apparatus and device manufacturing method
#3 | 2019-08-29Lithographic apparatus and device manufacturing method
#4 | 2019-08-15Lithographic apparatus and device manufacturing method
#5 | 2019-07-11Lithographic apparatus and device manufacturing method
#6 | 2019-03-21Lithographic apparatus and device manufacturing method
#7 | 2018-04-05Imprint lithography
#8 | 2018-02-15Lithographic apparatus and device manufacturing method
#9 | 2017-11-30Lithographic apparatus and device manufacturing method
#10 | 2017-11-16Lithographic apparatus and device manufacturing method
#11 | 2017-11-16Imprint lithography
#12 | 2017-10-12IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZZLES
#13 | 2017-04-13Lithographic apparatus and device manufacturing method
#14 | 2017-01-12Lithographic apparatus and device manufacturing method
#15 | 2016-10-13Lithographic apparatus and device manufacturing method
#16 | 2016-09-29Lithographic apparatus and device manufacturing method
#17 | 2016-09-29Lithographic apparatus and device manufacturing method
#18 | 2016-03-03LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#19 | 2015-12-17Lithographic apparatus and device manufacturing method
#20 | 2015-09-17Lithographic apparatus and device manufacturing method
#21 | 2015-06-18Lithographic apparatus and device manufacturing method
#22 | 2015-03-12Lithographic apparatus and device manufacturing method
#23 | 2014-11-13Immersion photolithography system and method using microchannel nozzles
#24 | 2014-10-02Imprint lithography
#25 | 2014-08-21Immersion photolithography system and method using microchannel nozzles
#26 | 2013-11-14Lithographic apparatus and method involving a fluid inlet and a fluid outlet
#27 | 2013-09-26Lithographic apparatus and device manufacturing method
#28 | 2013-05-23Lithographic apparatus and device manufacturing method
#29 | 2012-11-01Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
#30 | 2012-06-07Immersion photolithography system and method using microchannel nozzles
#31 | 2012-05-31Imprint lithography
#32 | 2012-04-19Imprint lithography
#33 | 2012-02-23Lithographic apparatus and device manufacturing method
#34 | 2011-11-24Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
#35 | 2011-11-24Imprint lithography
#36 | 2011-11-17Lithographic apparatus and device manufacturing method involving a member and a fluid opening
#37 | 2011-11-17Lithographic apparatus and device manufacturing method
#38 | 2011-11-10Lithographic apparatus and device manufacturing method
#39 | 2011-11-10Immersion photolithography system and method using microchannel nozzles
#40 | 2011-11-10Immersion photolithography system and method using microchannel nozzles
#41 | 2011-09-22Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
#42 | 2011-07-28Lithographic apparatus and device manufacturing method
#43 | 2011-07-14Lithographic apparatus and device manufacturing method
#44 | 2011-02-03Lithographic apparatus and device manufacturing method
#45 | 2011-01-13Lithographic apparatus and device manufacturing method
#46 | 2011-01-06Lithographic apparatus and device manufacturing method
#47 | 2010-12-02Lithographic apparatus and device manufacturing method
#48 | 2010-03-04Imprint lithography
#49 | 2009-11-26Lithographic apparatus and device manufacturing method
#50 | 2009-08-27Imprint lithography
#51 | 2009-07-23Lithographic apparatus and device manufacturing method
#52 | 2009-01-01Immersion lithographic apparatus and device manufacturing method with gas supply
#53 | 2008-09-11Lithographic apparatus and device manufacturing method
#54 | 2008-09-11Lithographic apparatus and device manufacturing method
#55 | 2008-07-31Immersion photolithography system and method using microchannel nozzles
#56 | 2008-04-15Lithographic apparatus and device manufacturing method
#57 | 2007-11-22Lithographic apparatus and device manufacturing method
#58 | 2007-11-08Lithographic apparatus and method
#59 | 2007-08-02Device manufacturing method and device
#60 | 2007-06-21Imprint lithography
#61 | 2007-06-14Lithographic apparatus and device manufacturing method
#62 | 2007-06-14Lithographic apparatus and device manufacturing method
#63 | 2007-06-14Lithographic apparatus and device manufacturing method
#64 | 2007-05-10Imprint lithography
#65 | 2007-05-10Imprint lithography
#66 | 2007-04-03Lithographic apparatus and device manufacturing method
#67 | 2007-03-20Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
#68 | 2007-02-22Lithographic apparatus and device manufacturing method
#69 | 2007-01-04Lithographic apparatus and device manufacturing method
#70 | 2006-10-19Lithographic apparatus and device manufacturing method
#71 | 2006-07-25Lithographic apparatus and device manufacturing method
#72 | 2006-07-20Imprint lithography
#73 | 2006-07-06Radiation exposure apparatus comprising a gas flushing system
#74 | 2006-06-29Imprint lithography
#75 | 2006-06-08Radiation exposure apparatus comprising a gas flushing system
#76 | 2006-02-02Lithographic projection apparatus
#77 | 2005-12-01Lithographic apparatus and device manufacturing method
#78 | 2005-10-04Lithographic apparatus and device manufacturing method
#79 | 2005-09-29Printing apparatus and device manufacturing method
#80 | 2005-09-08Printing apparatus and device manufacturing method
#81 | 2005-08-04Immersion photolithography system and method using microchannel nozzles
#82 | 2005-03-15Immersion photolithography system and method using microchannel nozzles
#83 | 2005-03-03Lithographic apparatus and device manufacturing method
#84 | 2005-01-27Lithographic apparatus and device manufacturing method
#85 | 2005-01-13Lithographic apparatus and device manufacturing method
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