Inventor profile of:

Klaus Simon

City:

Eindhoven

Country:

Netherlands

Published Applications:

85

Last publication date:

2020-07-16

Top Assignees for applications by Klaus Simon

The entities that hold a legal rights for patent applications filed by inventor Simon Klaus:

Recent patent applications by Simon Klaus

Klaus Simon from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2020-07-16
US20200225590A1
Physics

Lithographic apparatus and device manufacturing method

#2 | 2019-10-03
US20190302631A1
Physics

Lithographic apparatus and device manufacturing method

#3 | 2019-08-29
US20190265596A1
Physics

Lithographic apparatus and device manufacturing method

#4 | 2019-08-15
US20190250518A1
Physics

Lithographic apparatus and device manufacturing method

#5 | 2019-07-11
US20190212661A1
Physics

Lithographic apparatus and device manufacturing method

#6 | 2019-03-21
US20190086821A1
Physics

Lithographic apparatus and device manufacturing method

#7 | 2018-04-05
US20180095361A1
Physics

Imprint lithography

#8 | 2018-02-15
US20180046089A1
Physics

Lithographic apparatus and device manufacturing method

#9 | 2017-11-30
US20170343904A1
Physics

Lithographic apparatus and device manufacturing method

#10 | 2017-11-16
US20170329240A1
Physics

Lithographic apparatus and device manufacturing method

#11 | 2017-11-16
US20170329218A1
Physics

Imprint lithography

#12 | 2017-10-12
US20170293231A1
Physics

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZZLES

#13 | 2017-04-13
US20170102621A1
Physics

Lithographic apparatus and device manufacturing method

#14 | 2017-01-12
US20170010545A1
Physics

Lithographic apparatus and device manufacturing method

#15 | 2016-10-13
US20160299440A1
Physics

Lithographic apparatus and device manufacturing method

#16 | 2016-09-29
US20160282727A1
Physics

Lithographic apparatus and device manufacturing method

#17 | 2016-09-29
US20160282726A1
Physics

Lithographic apparatus and device manufacturing method

#18 | 2016-03-03
US20160062248A1
Physics

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#19 | 2015-12-17
US20150362844A1
Physics

Lithographic apparatus and device manufacturing method

#20 | 2015-09-17
US20150261102A1
Physics

Lithographic apparatus and device manufacturing method

#21 | 2015-06-18
US20150168850A1
Physics

Lithographic apparatus and device manufacturing method

#22 | 2015-03-12
US20150070668A1
Physics

Lithographic apparatus and device manufacturing method

#23 | 2014-11-13
US20140333910A1
Physics

Immersion photolithography system and method using microchannel nozzles

#24 | 2014-10-02
US20140291879A1
Performing operations; transporting

Imprint lithography

#25 | 2014-08-21
US20140233003A1
Physics

Immersion photolithography system and method using microchannel nozzles

#26 | 2013-11-14
US20130301017A1
Physics

Lithographic apparatus and method involving a fluid inlet and a fluid outlet

#27 | 2013-09-26
US20130250270A1
Physics

Lithographic apparatus and device manufacturing method

#28 | 2013-05-23
US20130128256A1
Physics

Lithographic apparatus and device manufacturing method

#29 | 2012-11-01
US20120274911A1
Physics

Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid

#30 | 2012-06-07
US20120140200A1
Physics

Immersion photolithography system and method using microchannel nozzles

#31 | 2012-05-31
US20120133076A1
Performing operations; transporting

Imprint lithography

#32 | 2012-04-19
US20120091629A1
Performing operations; transporting

Imprint lithography

#33 | 2012-02-23
US20120044468A1
Physics

Lithographic apparatus and device manufacturing method

#34 | 2011-11-24
US20110285977A1
Physics

Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap

#35 | 2011-11-24
US20110283937A1
Physics

Imprint lithography

#36 | 2011-11-17
US20110279800A1
Physics

Lithographic apparatus and device manufacturing method involving a member and a fluid opening

#37 | 2011-11-17
US20110279795A1
Physics

Lithographic apparatus and device manufacturing method

#38 | 2011-11-10
US20110273683A1
Physics

Lithographic apparatus and device manufacturing method

#39 | 2011-11-10
US20110273680A1
Physics

Immersion photolithography system and method using microchannel nozzles

#40 | 2011-11-10
US20110273676A1
Physics

Immersion photolithography system and method using microchannel nozzles

#41 | 2011-09-22
US20110228241A1
Physics

Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure

#42 | 2011-07-28
US20110181859A1
Physics

Lithographic apparatus and device manufacturing method

#43 | 2011-07-14
US20110170077A1
Physics

Lithographic apparatus and device manufacturing method

#44 | 2011-02-03
US20110027721A1
Physics

Lithographic apparatus and device manufacturing method

#45 | 2011-01-13
US20110007285A1
Physics

Lithographic apparatus and device manufacturing method

#46 | 2011-01-06
US20110001942A1
Physics

Lithographic apparatus and device manufacturing method

#47 | 2010-12-02
US20100302519A1
Physics

Lithographic apparatus and device manufacturing method

#48 | 2010-03-04
US20100050893A1
Performing operations; transporting

Imprint lithography

#49 | 2009-11-26
US20090290135A1
Physics

Lithographic apparatus and device manufacturing method

#50 | 2009-08-27
US20090212462A1
Performing operations; transporting

Imprint lithography

#51 | 2009-07-23
US20090184270A1
Physics

Lithographic apparatus and device manufacturing method

#52 | 2009-01-01
US20090002652A1
Physics

Immersion lithographic apparatus and device manufacturing method with gas supply

#53 | 2008-09-11
US20080218726A1
Physics

Lithographic apparatus and device manufacturing method

#54 | 2008-09-11
US20080218717A1
Physics

Lithographic apparatus and device manufacturing method

#55 | 2008-07-31
US20080180645A1
Physics

Immersion photolithography system and method using microchannel nozzles

#56 | 2008-04-15
US10724402
-

Lithographic apparatus and device manufacturing method

#57 | 2007-11-22
US20070268471A1
Physics

Lithographic apparatus and device manufacturing method

#58 | 2007-11-08
US20070258080A1
Physics

Lithographic apparatus and method

#59 | 2007-08-02
US20070178707A1
Physics

Device manufacturing method and device

#60 | 2007-06-21
US20070141191A1
Performing operations; transporting

Imprint lithography

#61 | 2007-06-14
US20070132979A1
Physics

Lithographic apparatus and device manufacturing method

#62 | 2007-06-14
US20070132972A1
Physics

Lithographic apparatus and device manufacturing method

#63 | 2007-06-14
US20070132970A1
Physics

Lithographic apparatus and device manufacturing method

#64 | 2007-05-10
US20070102844A1
Performing operations; transporting

Imprint lithography

#65 | 2007-05-10
US20070102838A1
Physics

Imprint lithography

#66 | 2007-04-03
US10705804
-

Lithographic apparatus and device manufacturing method

#67 | 2007-03-20
US10705816
-

Lithographic apparatus and device manufacturing method with substrate measurement not through liquid

#68 | 2007-02-22
US20070040133A1
Physics

Lithographic apparatus and device manufacturing method

#69 | 2007-01-04
US20070002303A1
Physics

Lithographic apparatus and device manufacturing method

#70 | 2006-10-19
US20060232756A1
Physics

Lithographic apparatus and device manufacturing method

#71 | 2006-07-25
US10705805
-

Lithographic apparatus and device manufacturing method

#72 | 2006-07-20
US20060159305A1
Performing operations; transporting

Imprint lithography

#73 | 2006-07-06
US20060146300A1
Physics

Radiation exposure apparatus comprising a gas flushing system

#74 | 2006-06-29
US20060137555A1
Performing operations; transporting

Imprint lithography

#75 | 2006-06-08
US20060119811A1
Physics

Radiation exposure apparatus comprising a gas flushing system

#76 | 2006-02-02
US20060023189A1
Physics

Lithographic projection apparatus

#77 | 2005-12-01
US20050264778A1
Physics

Lithographic apparatus and device manufacturing method

#78 | 2005-10-04
US10705783
-

Lithographic apparatus and device manufacturing method

#79 | 2005-09-29
US20050211161A1
Physics

Printing apparatus and device manufacturing method

#80 | 2005-09-08
US20050193944A1
Physics

Printing apparatus and device manufacturing method

#81 | 2005-08-04
US20050168713A1
Physics

Immersion photolithography system and method using microchannel nozzles

#82 | 2005-03-15
US10464542
-

Immersion photolithography system and method using microchannel nozzles

#83 | 2005-03-03
US20050046813A1
Physics

Lithographic apparatus and device manufacturing method

#84 | 2005-01-27
US20050018156A1
Physics

Lithographic apparatus and device manufacturing method

#85 | 2005-01-13
US20050007569A1
Physics

Lithographic apparatus and device manufacturing method

InventorID:

258391 ⎘