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Assignee profile:

ZYGO CORPORATION

City:

Middlefield, Connecticut

Country:

United States

Published Applications:

226

Last publication date:

2025-04-17

Patent Grants:

220

Last grant date:

2026-03-24

Quarterly ZYGO CORPORATION Patent Applications

Top Inventors for applications by ZYGO CORPORATION

These are the the leading inventors for applications assigned to ZYGO CORPORATION:

Henry A. Hill 54 Tucson, AZ United States
Peter J. de Groot 45 Middletown, CT United States
Leslie L. Deck 38 Middletown, CT United States
Peter de Groot 36 Middletown, CT United States

Xavier Colonna De Lega 30 Middletown, CT United States
Jan Liesener 21 Middletown, CT United States
Xavier Colonna de Lega 16 Middlefield, CT United States
Michael Küchel 7 Oberkochen, Germany

Andrew Eric Carlson 7 Higganum, CT United States
Frank C. Demarest 7 Higganum, CT United States
Mark Davidson 6 Palo Alto, CA United States
Michael Schroeder 6 East Hampton, CT United States

Zygo Corporation 5 Middlefield, CT United States
Robert Stoner 5 Duxbury, MA United States
Henry Allen HILL 4 Tucson, AZ United States
Christopher James Evans 4 Higganum, CT United States

Xavier M. Colonna de Lega 4 Middlefield, CT United States
Robert Stoner 4 Chester, CT United States
Gary Womack 4 Tucson, AZ United States
Michael Kuechel 3 Oberkochen, Germany

Gregg M. Gallatin 3 Newtown, CT United States
Michael J. Darwin 3 Beaverton, OR United States
Paul A. Townley-Smith 3 Irvine, CA United States
Thomas Dresel 3 Nuremberg, Germany

Vivek G. Badami 3 Higganum, CT United States
James F. Biegen 2 Middletown, CT United States
Justin L. Kreuzer 2 Trumbull, CT United States
Martin Fay 2 Middletown, CT United States

Bruce E. Truax 2 Southington, CT United States
Chris Koliopoulos 2 Tucson, AZ United States
Carl Zanoni 2 Middlefield, CT United States
John Kondis 2 Costa Mesa, CA United States

Martin F. Fay 2 Middletown, CT United States
Daniel M. Sykora 2 Middletown, CT United States
Michael Lowell Holmes 2 Lebanon, CT United States
John Matthew Kincade 2 Vacaville, CA United States

Eliseo Romolo Ranalli 2 Irvine, CA United States
Thomas Dresel 2 Nuernberg, Germany
Carl A. Zanoni 2 Middlefield, CT United States
Andrew D. Meigs 1 Durham, CT United States

Andrew Nelson 1 Portland, CT United States
Christoper James Evans 1 Higganum, CT United States
Stephen L. Mielke 1 West Hartford, CT United States
Justin Kreuzer 1 Trumbull, CT United States

Frank C. Demarest 1 Pomfret Center, CT United States
Tyler Steele 1 Hamden, CT United States
Peter De Groot 1 Middleton, CT United States
Xavier Colonna De Lega 1 Middleton, CT United States

Robert T Stoner 1 Duxbury, MA United States
Marc Tricard 1 Glastonbury, CT United States
Peter J. deGroot 1 Middletown, CT United States
Nicholas G. Doe 1 San Ramon, CA United States

Robert M. Carangelo 1 Glastonbury, CT United States
Alexander D. Wesley 1 Middletown, CT United States
Phillip H. Malyak 1 Canton, MA United States
David A. Grigg 1 Glastonberry, CT United States

Charles McFee 1 Glastonbury, CT United States
Michael J. Darwin 1 Beaverton, DE United States
Klaus Freischlad 1 Tucson, AZ United States
Christopher J. Evans 1 Concord, NC United States

Jeffrey Johnston 1 Tucson, AZ United States
Thomas Dresel 1 Nurnberg, Germany
Robert A. Smythe 1 Middletown, CT United States
Nicholas Mark Cirucci 1 Rocky Hill, CT United States

Kurt Redlitz 1 Middlefield, CT United States
Justin Turner 1 Middletown, CT United States
Andrew Eric Carlson 1 Middletown, CT United States
David Kent 1 Framingham, MA United States

Matthew Van Doren 1 Southbury, CT United States
Senthil Balasubramaniam 1 Rocky Hill, CT United States
Alan H. FIELD 1 Essex, CT United States
Donald S. Battistoni 1 Farmington, CT United States

John Filhaber 1 East Haddam, CT United States
William A. Shull 1 Aptos, CA United States
Douglas Martin Hoon 1 Guilford, CT United States
James Parsons 1 Santa Cruz, CA United States

Eliseo Romolo Ranalli 1 Irvin, CA United States
William P. Kuhn 1 Tucson, AZ United States
Richard Earl Bills 1 Haddam, CT United States
Scott Hellman 1 Aliso Viejo, CA United States

William P. Kuhn 1 Tuscon, AZ United States
Leslie L. Deck 1 Middlefield, CT United States
Mark Bremer 1 Benicia, CA United States

Recent patent applications by ZYGO CORPORATION

ZYGO CORPORATION based in Middlefield, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2025-04-17 ✅ Patent 12,584,726 granted on 2026-03-24

US20250123093A1

Physics

INTERFEROMETRIC METHOD FOR MEASURING OPTICAL DISTANCE

#2 | 2024-02-15 ✅ Patent 12,104,897 granted on 2024-10-01

US20240053143A1

Physics

Interometric optical system

#3 | 2023-11-16 ✅ Patent 12,644,692 granted on 2026-06-02

US20230366670A1

Physics

DATA AGE REDUCTION

#4 | 2023-03-23 ✅ Patent 12,305,980 granted on 2025-05-20

US20230092947A1

Physics

Optical contact metrology

#5 | 2023-02-23 ✅ Patent 11,966,041 granted on 2024-04-23

US20230058624A1

Physics

Optical module

#6 | 2023-02-02 ✅ Patent 12,292,274 granted on 2025-05-06

US20230031531A1

Physics

Interferometric lens aligner and method

#7 | 2022-02-24 ✅ Patent 11,841,548 granted on 2023-12-12

US20220057599A1

Physics

Variable-zoom imaging apparatus

#8 | 2021-05-27 ✅ Patent 11,605,478 granted on 2023-03-14

US20210158989A1

Physics

Method of reducing roughness and/or defects on an optical surface and mirror formed by same

#9 | 2021-04-29 ✅ Patent 11,520,234 granted on 2022-12-06

US20210124270A1

Physics

Method of mitigating defects on an optical surface and mirror formed by same

#10 | 2020-09-03 ✅ Patent 11,443,950 granted on 2022-09-13

US20200279746A1

Electricity

Method for figure control of optical surfaces

#11 | 2020-01-02 ✅ Patent 10,845,251 granted on 2020-11-24

US20200003620A1

Physics

Wavemeter using pairs of interferometric optical cavities

#12 | 2019-11-14 ✅ Patent 10,962,348 granted on 2021-03-30

US20190346251A1

Physics

Method and apparatus for optimizing the optical performance of interferometers

#13 | 2019-08-29 ✅ Patent 10,591,284 granted on 2020-03-17

US20190265023A1

Physics

Metrology of multi-layer stacks

#14 | 2018-06-28 ✅ Patent 10,451,413 granted on 2019-10-22

US20180180412A1

Physics

Surface topography apparatus and method

#15 | 2018-05-24 ✅ Patent 10,890,428 granted on 2021-01-12

US20180143002A1

Physics

Interferometric method and apparatus using calibration information relating a focus setting to a test object position

#16 | 2017-12-14 ✅ Patent 10,190,871 granted on 2019-01-29

US20170356739A1

Physics

Precision positioning system using a wavelength tunable laser

#17 | 2017-08-01 ✅ Patent 9,719,777 granted on 2017-08-01

US14723803

Physics

Interferometer with real-time fringe-free imaging

#18 | 2017-07-06 ✅ Patent 10,267,617 granted on 2019-04-23

US20170191821A1

Physics

Method and apparatus for optimizing the optical performance of interferometers

#19 | 2016-12-15 ✅ Patent 9,823,061 granted on 2017-11-21

US20160363439A1

Physics

Displacement measurement of deformable bodies

#20 | 2016-04-14 ✅ Patent 10,066,974 granted on 2018-09-04

US20160102999A1

Physics

Interferometric encoder systems having at least partially overlapping diffracted beams

#21 | 2016-02-18 ✅ Patent 9,658,129 granted on 2017-05-23

US20160047712A1

Physics

Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portion

#22 | 2016-02-18 ✅ Patent 9,599,534 granted on 2017-03-21

US20160047711A1

Physics

Optical evaluation of lenses and lens molds

#23 | 2016-01-14 ✅ Patent 9,891,078 granted on 2018-02-13

US20160011016A1

Physics

Interferometric encoders using spectral analysis

#24 | 2015-10-15 ✅ Patent 9,746,348 granted on 2017-08-29

US20150292913A1

Physics

Double pass interferometric encoder system

#25 | 2015-10-08 ✅ Patent 9,411,222 granted on 2016-08-09

US20150286129A1

Physics

Photo-masks for lithography

#26 | 2015-07-09 ✅ Patent 9,798,130 granted on 2017-10-24

US20150192769A1

Physics

Measuring topography of aspheric and other non-flat surfaces

#27 | 2015-06-04 ✅ Patent 9,435,640 granted on 2016-09-06

US20150153163A1

Physics

Interferometer and method for measuring non-rotationally symmetric surface topography having unequal curvatures in two perpendicular principal meridians

#28 | 2015-02-26 ✅ Patent 9,234,739 granted on 2016-01-12

US20150055139A1

Physics

In situ calibration of interferometers

#29 | 2015-02-12 ✅ Patent 9,377,292 granted on 2016-06-28

US20150043006A1

Physics

Interferometry employing refractive index dispersion broadening of interference signals

#30 | 2015-02-12 ✅ Patent 9,140,537 granted on 2015-09-22

US20150043005A1

Physics

Interferometric heterodyne optical encoder system

#31 | 2014-09-18

US20140268105A1

Physics

OPTICAL DEFECT INSPECTION SYSTEM

#32 | 2014-08-14 ✅ Patent 9,176,299 granted on 2015-11-03

US20140226223A1

Physics

Monolithic optical components with integrated flexures

#33 | 2014-08-14 ✅ Patent 9,541,381 granted on 2017-01-10

US20140226150A1

Physics

Surface topography interferometer with surface color

#34 | 2014-07-15 ✅ Patent 8,780,334 granted on 2014-07-15

US13433697

Topographical profiling with coherence scanning interferometry

#35 | 2014-04-10 ✅ Patent 9,115,975 granted on 2015-08-25

US20140098375A1

Physics

Position monitoring system with reduced noise

#36 | 2014-02-20 ✅ Patent 8,988,690 granted on 2015-03-24

US20140049782A1

Physics

Interferometric encoder systems

#37 | 2013-10-24 ✅ Patent 9,146,093 granted on 2015-09-29

US20130278914A1

Physics

Non-harmonic cyclic error compensation in interferometric encoder systems

#38 | 2013-06-20 ✅ Patent 8,902,431 granted on 2014-12-02

US20130155413A1

Physics

Low coherence interferometry with scan error correction

#39 | 2013-05-23 ✅ Patent 9,200,892 granted on 2015-12-01

US20130128254A1

Physics

Thermally stable optical sensor mount

#40 | 2013-05-23

US20130128249A1

Physics

Fiber Delivery for Metrology Systems Used in Lithography Tools

#41 | 2013-05-09

US20130114087A1

Physics

LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMS

#42 | 2013-05-09 ✅ Patent 9,201,313 granted on 2015-12-01

US20130114062A1

Physics

Compact encoder head for interferometric encoder system

#43 | 2013-05-09 ✅ Patent 8,941,842 granted on 2015-01-27

US20130114061A1

Physics

Double pass interferometric encoder system

#44 | 2013-03-14 ✅ Patent 9,103,649 granted on 2015-08-11

US20130063730A1

Physics

In situ calibration of interferometers

#45 | 2012-09-13 ✅ Patent 8,698,891 granted on 2014-04-15

US20120229621A1

Physics

Object thickness and surface profile measurements

#46 | 2012-09-06

US20120224183A1

Physics

INTERFEROMETRIC METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURES

#47 | 2012-08-02 ✅ Patent 8,885,172 granted on 2014-11-11

US20120194824A1

Physics

Interferometric heterodyne optical encoder system

#48 | 2012-07-05 ✅ Patent 8,670,127 granted on 2014-03-11

US20120170048A1

Physics

Interferometric encoder systems

#49 | 2012-06-21 ✅ Patent 8,913,226 granted on 2014-12-16

US20120154780A1

Physics

Cyclic error compensation in interferometric encoder systems

#50 | 2012-06-07 ✅ Patent 8,649,024 granted on 2014-02-11

US20120140243A1

Physics

Non-contact surface characterization using modulated illumination

#51 | 2012-05-17 ✅ Patent 8,797,537 granted on 2014-08-05

US20120120411A1

Physics

Interferometer with a virtual reference surface

#52 | 2012-04-12

US20120089365A1

Physics

DATA INTERPOLATION METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURES

#53 | 2012-03-22 ✅ Patent 8,854,628 granted on 2014-10-07

US20120069326A1

Physics

Interferometric methods for metrology of surfaces, films and underresolved structures

#54 | 2011-10-20 ✅ Patent 8,300,233 granted on 2012-10-30

US20110255096A1

Physics

Interferometric encoder systems

#55 | 2011-03-03 ✅ Patent 8,456,644 granted on 2013-06-04

US20110051147A1

Physics

Measurement of changes in surfaces of objects

#56 | 2011-02-10 ✅ Patent 8,189,202 granted on 2012-05-29

US20110032535A1

Physics

Interferometer for determining overlay errors

#57 | 2011-02-03 ✅ Patent 7,948,639 granted on 2011-05-24

US20110026036A1

Physics

Phase-shifting interferometry in the presence of vibration

#58 | 2011-01-13 ✅ Patent 8,045,175 granted on 2011-10-25

US20110007323A1

Physics

Equal-path interferometer

#59 | 2010-10-21 ✅ Patent 7,948,636 granted on 2011-05-24

US20100265516A1

Physics

Interferometer and method for measuring characteristics of optically unresolved surface features

#60 | 2010-09-23 ✅ Patent 7,948,637 granted on 2011-05-24

US20100238455A1

Physics

Error compensation in phase shifting interferometry

#61 | 2010-08-05 ✅ Patent 8,107,084 granted on 2012-01-31

US20100195112A1

Physics

Interference microscope with scan motion detection using fringe motion in monitor patterns

#62 | 2010-06-10 ✅ Patent 7,889,356 granted on 2011-02-15

US20100141959A1

Physics

Two grating lateral shearing wavefront sensor

#63 | 2010-06-03 ✅ Patent 7,952,724 granted on 2011-05-31

US20100134786A1

Physics

Interferometer with multiple modes of operation for determining characteristics of an object surface

#64 | 2010-05-27 ✅ Patent 8,120,781 granted on 2012-02-21

US20100128283A1

Physics

Interferometric systems and methods featuring spectral analysis of unevenly sampled data

#65 | 2010-05-27 ✅ Patent 8,004,688 granted on 2011-08-23

US20100128280A1

Physics

Scan error correction in low coherence scanning interferometry

#66 | 2010-05-27 ✅ Patent 8,379,218 granted on 2013-02-19

US20100128278A1

Physics

Fiber-based interferometer system for monitoring an imaging interferometer

#67 | 2010-05-27 ✅ Patent 7,978,338 granted on 2011-07-12

US20100128276A1

Physics

Compound reference interferometer

#68 | 2010-05-13 ✅ Patent 7,796,273 granted on 2010-09-14

US20100118313A1

Physics

Phase-shifting interferometry in the presence of vibration

#69 | 2010-05-13 ✅ Patent 7,796,275 granted on 2010-09-14

US20100118312A1

Physics

Phase-shifting interferometry in the presence of vibration using phase bias

#70 | 2010-05-06 ✅ Patent 7,948,638 granted on 2011-05-24

US20100110446A1

Physics

Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts

#71 | 2010-04-15 ✅ Patent 7,826,064 granted on 2010-11-02

US20100091296A1

Physics

Interferometer system for monitoring an object

#72 | 2010-03-11 ✅ Patent 8,107,085 granted on 2012-01-31

US20100060898A1

Physics

Methods and systems for interferometric analysis of surfaces and related applications

#73 | 2009-12-10 ✅ Patent 9,025,162 granted on 2015-05-05

US20090303493A1

Physics

Interferometry for lateral metrology

#74 | 2009-11-12 ✅ Patent 8,123,593 granted on 2012-02-28

US20090280721A1

Performing operations; transporting

Configuring of lapping and polishing machines

#75 | 2009-10-22 ✅ Patent 8,248,617 granted on 2012-08-21

US20090262362A1

Physics

Interferometer for overlay measurements

#76 | 2009-07-23 ✅ Patent 7,751,064 granted on 2010-07-06

US20090185195A1

Physics

Interference objective for annular test surfaces

#77 | 2009-07-16 ✅ Patent 8,126,677 granted on 2012-02-28

US20090182528A1

Physics

Analyzing surface structure using scanning interferometry

#78 | 2009-06-11 ✅ Patent 8,072,611 granted on 2011-12-06

US20090147268A1

Physics

Interferometric analysis of under-resolved features

#79 | 2009-05-21 ✅ Patent 7,978,337 granted on 2011-07-12

US20090128827A1

Physics

Interferometer utilizing polarization scanning

#80 | 2009-04-16 ✅ Patent 7,586,620 granted on 2009-09-08

US20090096980A1

Physics

Methods and systems for interferometric analysis of surfaces and related applications

#81 | 2009-01-22 ✅ Patent 7,619,746 granted on 2009-11-17

US20090021723A1

Physics

Generating model signals for interferometry

#82 | 2009-01-15 ✅ Patent 7,812,963 granted on 2010-10-12

US20090015844A1

Physics

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

#83 | 2008-12-11 ✅ Patent 7,576,868 granted on 2009-08-18

US20080304077A1

Physics

Cyclic error compensation in interferometry systems

#84 | 2008-11-20 ✅ Patent 7,812,965 granted on 2010-10-12

US20080285051A1

Physics

Multiple-degree of freedom interferometer with compensation for gas effects

#85 | 2008-11-13

US20080278730A1

Physics

METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIS USING LOW COHERENCE INTERFERENCE SIGNALS

#86 | 2008-10-30 ✅ Patent 7,684,049 granted on 2010-03-23

US20080266574A1

Physics

Interferometer and method for measuring characteristics of optically unresolved surface features

#87 | 2008-10-30 ✅ Patent 7,710,580 granted on 2010-05-04

US20080266571A1

Physics

Vibration resistant interferometry

#88 | 2008-09-11 ✅ Patent 7,564,566 granted on 2009-07-21

US20080221837A1

Physics

Method and system for analyzing low-coherence interferometry signals for information about thin film structures

#89 | 2008-07-31 ✅ Patent 7,468,799 granted on 2008-12-23

US20080180694A1

Physics

Scanning interferometry for thin film thickness and surface measurements

#90 | 2008-07-31 ✅ Patent 7,889,355 granted on 2011-02-15

US20080180685A1

Physics

Interferometry for lateral metrology

#91 | 2008-07-31 ✅ Patent 7,933,025 granted on 2011-04-26

US20080180679A1

Physics

Sinusoidal phase shifting interferometry

#92 | 2008-07-24 ✅ Patent 7,924,435 granted on 2011-04-12

US20080174784A1

Physics

Apparatus and method for measuring characteristics of surface features

#93 | 2008-07-10 ✅ Patent 7,639,367 granted on 2009-12-29

US20080165347A1

Physics

Interferometer system for monitoring an object

#94 | 2008-07-10 ✅ Patent 7,812,964 granted on 2010-10-12

US20080165345A1

Physics

Distance measuring interferometer and encoder metrology systems for use in lithography tools

#95 | 2008-06-26 ✅ Patent 7,894,075 granted on 2011-02-22

US20080151229A1

Physics

Multiple-degree of freedom interferometer with compensation for gas effects

#96 | 2008-05-22 ✅ Patent 7,548,322 granted on 2009-06-16

US20080117428A1

Physics

Multi-axis interferometers and methods and systems using multi-axis interferometers

#97 | 2008-04-17 ✅ Patent 7,884,947 granted on 2011-02-08

US20080088849A1

Physics

Interferometry for determining characteristics of an object surface, with spatially coherent illumination

#98 | 2008-03-20 ✅ Patent 7,456,975 granted on 2008-11-25

US20080068614A1

Physics

Methods and systems for interferometric analysis of surfaces and related applications

#99 | 2008-03-20 ✅ Patent 7,612,893 granted on 2009-11-03

US20080068613A1

Physics

Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts

#100 | 2008-03-13 ✅ Patent 7,466,429 granted on 2008-12-16

US20080065350A1

Physics

Profiling complex surface structures using scanning interferometry

Also check out Zygo Corporation's (Middlefield, United States) applicant profile with 42 patent applications submitted.

AssigneeID:

13572 ⎘