Veldhoven
Netherlands
7
2022-01-06
7
2022-10-25
These are the the leading inventors for applications assigned to ASML Holding N. V.:
ASML Holding N. V. based in Veldhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Apparatus for and method cleaning a support inside a lithography apparatus
#2 | 2021-10-28 ✅ Patent 11,249,402 granted on 2022-02-15Adjustable retardance compensator for self-referencing interferometer devices
#3 | 2021-06-17 ✅ Patent 11,415,893 granted on 2022-08-16Assembly for use in semiconductor photolithography and method of manufacturing same
#4 | 2021-06-10 ✅ Patent 11,137,694 granted on 2021-10-05Particle suppression systems and methods
#5 | 2019-11-14 ✅ Patent 10,642,166 granted on 2020-05-05Patterning device cooling apparatus
#6 | 2013-04-04 ✅ Patent 9,285,687 granted on 2016-03-15Inspection apparatus, lithographic apparatus, and device manufacturing method
#7 | 2005-12-01 ✅ Patent 7,135,693 granted on 2006-11-14Method and apparatus for recycling gases used in a lithography tool
Also check out ASML HOLDING N. V.'s (Veldhoven, Netherlands) applicant profile with 1 patent applications submitted.
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