Eindhoven
Netherlands
4
2024-05-30
The entities that hold a legal rights for patent applications filed by inventor NAKÍBOGLU Günes:
Günes NAKÍBOGLU from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
TEMPERATURE CONDITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD OF TEMPERATURE CONDITIONING AN OBJECT
#2 | 2020-02-06Lithographic apparatus and method
#3 | 2019-11-14Patterning device cooling apparatus
#4 | 2019-04-04Patterning device cooling system and method of thermally conditioning a patterning device
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