Eindhoven
Netherlands
12
2023-01-05
The entities that hold a legal rights for patent applications filed by inventor Cekli Hakki Ergun:
Hakki Ergun Cekli from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Device manufacturing methods
#2 | 2021-12-16Method for determining root cause affecting yield in a semiconductor manufacturing process
#3 | 2020-11-12Method to label substrates based on process parameters
#4 | 2020-08-27Lithographic method
#5 | 2020-06-25Device manufacturing methods
#6 | 2020-05-14Method of determining a position of a feature
#7 | 2020-04-02Patterning device cooling system and method of thermally conditioning a patterning device
#8 | 2019-11-14Patterning device cooling apparatus
#9 | 2019-11-07Method of determining a position of a feature
#10 | 2016-11-17Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
#11 | 2016-08-04Metrology method and apparatus, computer program and lithographic system
#12 | 2015-07-23Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus
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