DR Veldhoven
Netherlands
15
2012-08-23
13
2014-05-27
These are the the leading inventors for applications assigned to ASML Netherlands B.V.:
ASML Netherlands B.V. based in DR Veldhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method of pattern selection for source and mask optimization
#2 | 2011-05-05Focus Sensor, Inspection Apparatus, Lithographic Apparatus and Control System
#3 | 2011-01-20 ✅ Patent 8,068,212 granted on 2011-11-29Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements
#4 | 2006-10-19 ✅ Patent 7,218,380 granted on 2007-05-15Lithographic apparatus and device manufacturing method
#5 | 2006-10-12 ✅ Patent 7,283,249 granted on 2007-10-16Lithographic apparatus and a method of calibrating such an apparatus
#6 | 2006-10-12 ✅ Patent 7,436,485 granted on 2008-10-14Lithographic apparatus, patterning assembly and contamination estimation method
#7 | 2006-06-22 ✅ Patent 7,136,149 granted on 2006-11-14Lithographic apparatus with autofocus system
#8 | 2006-05-18 ✅ Patent 7,327,439 granted on 2008-02-05Lithographic apparatus and device manufacturing method
#9 | 2006-05-04 ✅ Patent 7,274,432 granted on 2007-09-25Radiation system, lithographic apparatus, device manufacturing method, and device manufactured thereby
#10 | 2006-02-16 ✅ Patent 7,791,727 granted on 2010-09-07Method and apparatus for angular-resolved spectroscopic lithography characterization
#11 | 2006-01-26 ✅ Patent 7,161,663 granted on 2007-01-09Lithographic apparatus
#12 | 2005-11-24 ✅ Patent 7,315,032 granted on 2008-01-01Lithographic apparatus and a device manufacturing method
#13 | 2005-11-24 ✅ Patent 7,616,383 granted on 2009-11-10Lithographic apparatus and device manufacturing method
#14 | 2005-01-27 ✅ Patent 7,253,884 granted on 2007-08-07Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method
#15 | 2005-01-06Lithographic apparatus and device manufacturing method
Also check out ASML Netherlands B.V.'s (DR Veldhoven, Netherlands) applicant profile with 1 patent applications submitted.
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