Eindhoven
Netherlands
28
2018-12-20
The entities that hold a legal rights for patent applications filed by inventor Eussen Emiel Jozef Melanie:
Emiel Jozef Melanie Eussen from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Position measurement system and lithographic apparatus
#2 | 2016-08-04Stage apparatus, lithographic apparatus and method of positioning an object table
#3 | 2016-04-21Lithographic apparatus
#4 | 2014-01-23Lithographic apparatus
#5 | 2013-02-28Position measurement system, lithographic apparatus and device manufacturing method
#6 | 2012-09-27Lithographic apparatus
#7 | 2012-03-01Stage apparatus, lithographic apparatus and method of positioning an object table
#8 | 2011-08-25Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
#9 | 2011-05-19Lithographic apparatus and device manufacturing method
#10 | 2010-10-28Lithographic apparatus having a substrate support with open cell plastic foam parts
#11 | 2010-01-14Lithographic apparatus and calibration method
#12 | 2009-11-12Stage system and lithographic apparatus comprising such stage system
#13 | 2009-09-24Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system
#14 | 2009-05-21Stage system, lithographic apparatus including such stage system, and correction method
#15 | 2008-12-25Lithographic projection apparatus and method for controlling a support structure
#16 | 2008-11-27Lithographic apparatus having an encoder position sensor system
#17 | 2008-11-13Lithographic apparatus and sensor calibration method
#18 | 2008-05-08Lithographic apparatus and device manufacturing method
#19 | 2007-08-23Lithographic apparatus and device manufacturing method
#20 | 2007-06-28Lithographic apparatus, and apparatus and method for measuring an object position in a medium
#21 | 2007-06-14Lithographic apparatus and device manufacturing method
#22 | 2007-04-05Lithographic apparatus temperature compensation
#23 | 2007-03-29Lithographic apparatus and device manufacturing method
#24 | 2007-03-08Position measurement system and lithographic apparatus
#25 | 2007-03-08Position measurement system and lithographic apparatus
#26 | 2006-10-12Lithographic apparatus and a method of calibrating such an apparatus
#27 | 2006-06-29Lithographic apparatus and device manufacturing method
#28 | 2005-11-10Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof
110920 ⎘