Austin, Texas
United States
30
2013-05-16
30
2013-11-05
These are the the leading inventors for applications assigned to SEMATECH, INC.:
SEMATECH, INC. based in Austin, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Partial die process for uniform etch loading of imprint wafers
#2 | 2011-12-08 ✅ Patent 8,432,020 granted on 2013-04-30Capacitors, systems, and methods
#3 | 2011-11-17 ✅ Patent 8,421,165 granted on 2013-04-16Apparatus, system, and method for tunneling MOSFETs using self-aligned heterostructure source and isolated drain
#4 | 2011-10-13 ✅ Patent 8,366,431 granted on 2013-02-05Partial die process for uniform etch loading of imprint wafers
#5 | 2011-09-08 ✅ Patent 8,436,422 granted on 2013-05-07Tunneling field-effect transistor with direct tunneling for enhanced tunneling current
#6 | 2011-06-23 ✅ Patent 8,493,546 granted on 2013-07-23Plasma as a band pass filter for photo lithography
#7 | 2011-06-09 ✅ Patent 8,206,510 granted on 2012-06-26Method and apparatus for an in-situ ultraviolet cleaning tool
#8 | 2010-12-23 ✅ Patent 8,178,939 granted on 2012-05-15Interfacial barrier for work function modification of high performance CMOS devices
#9 | 2010-04-01 ✅ Patent 7,736,954 granted on 2010-06-15Methods for nanoscale feature imprint molding
#10 | 2009-08-27 ✅ Patent 8,134,684 granted on 2012-03-13Immersion lithography using hafnium-based nanoparticles
#11 | 2009-04-30 ✅ Patent 7,732,120 granted on 2010-06-08Method for making soft pellicles
#12 | 2009-03-26 ✅ Patent 7,709,180 granted on 2010-05-04Soft pellicle and method of making same
#13 | 2009-03-05 ✅ Patent 7,760,341 granted on 2010-07-20Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processes
#14 | 2009-02-19 ✅ Patent 7,709,816 granted on 2010-05-04Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication
#15 | 2009-01-29 ✅ Patent 7,741,168 granted on 2010-06-22Systems and methods for fabricating nanometric-scale semiconductor devices with dual-stress layers using double-stress oxide/nitride stacks
#16 | 2009-01-15 ✅ Patent 8,338,267 granted on 2012-12-25Systems and methods for vertically integrating semiconductor devices
#17 | 2008-12-04 ✅ Patent 7,855,139 granted on 2010-12-21Systems and methods for controlling the effective dielectric constant of materials used in a semiconductor device
#18 | 2008-06-19 ✅ Patent 7,772,710 granted on 2010-08-10Zero-order overlay targets
#19 | 2008-05-01 ✅ Patent 7,548,067 granted on 2009-06-16Methods for measuring capacitance
#20 | 2007-09-13 ✅ Patent 7,595,204 granted on 2009-09-29Methods and systems for determining trapped charge density in films
#21 | 2007-07-19 ✅ Patent 7,629,556 granted on 2009-12-08Laser nozzle methods and apparatus for surface cleaning
#22 | 2007-04-12 ✅ Patent 7,430,051 granted on 2008-09-30Methods for characterizing semiconductor material using optical metrology
#23 | 2007-03-22 ✅ Patent 7,332,433 granted on 2008-02-19Methods of modulating the work functions of film layers
#24 | 2007-01-18 ✅ Patent 7,626,712 granted on 2009-12-01Methods and systems for characterizing semiconductor materials
#25 | 2007-01-18 ✅ Patent 7,580,138 granted on 2009-08-25Methods and systems for characterizing semiconductor materials
#26 | 2006-11-23 ✅ Patent 7,497,913 granted on 2009-03-03Method and apparatus for colloidal particle cleaning
#27 | 2006-09-21 ✅ Patent 7,921,859 granted on 2011-04-12Method and apparatus for an in-situ ultraviolet cleaning tool
#28 | 2006-07-20 ✅ Patent 7,250,620 granted on 2007-07-31EUV lithography filter
#29 | 2006-05-11 ✅ Patent 7,128,427 granted on 2006-10-31Method and apparatus for fluid handling in immersion lithography
#30 | 2005-09-29 ✅ Patent 7,504,192 granted on 2009-03-17Soft pellicle for 157 and 193 nm and method of making same
Also check out Sematech, Inc.'s (Austin, United States) applicant profile with 1 patent applications submitted.
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