Vendhoven
Netherlands
7
2022-06-23
6
2023-01-17
These are the the leading inventors for applications assigned to ASML NETHERLANDS B.V.:
ASML NETHERLANDS B.V. based in Vendhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Contamination trap
#2 | 2022-05-05 ✅ Patent 11,556,066 granted on 2023-01-17Stage system and lithographic apparatus
#3 | 2021-05-06 ✅ Patent 11,181,829 granted on 2021-11-23Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process
#4 | 2010-08-19FLUID SUPPLY SYSTEM, A LITHOGRAPHIC APPARATUS, A METHOD OF VARYING FLUID FLOW RATE AND A DEVICE MANUFACTURING METHOD
#5 | 2010-07-08 ✅ Patent 8,681,309 granted on 2014-03-25Lithographic apparatus and device manufacturing method
#6 | 2008-08-21 ✅ Patent 7,701,577 granted on 2010-04-20Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#7 | 2006-06-15 ✅ Patent 7,362,413 granted on 2008-04-22Uniformity correction for lithographic apparatus
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