Best
Netherlands
13
2026-02-12
The entities that hold a legal rights for patent applications filed by inventor Van Drent William Peter:
William Peter Van Drent from Best, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
A LIQUID TARGET MATERIAL SUPPLYING APPARATUS, FUEL EMITTER, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND LIQUID TARGET MATERIAL SUPPLYING METHOD
#2 | 2025-11-06DROPLET GENERATOR NOZZLE
#3 | 2025-01-16APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE
#4 | 2024-05-16PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
#5 | 2023-03-23Contamination trap
#6 | 2022-09-15Prolonging optical element lifetime in an EUV lithography system
#7 | 2022-06-23Contamination trap
#8 | 2021-04-15Prolonging optical element lifetime in an EUV lithography system
#9 | 2021-03-11Sensor, lithographic apparatus, and device manufacturing method
#10 | 2016-04-21Lithographic apparatus
#11 | 2014-01-23Lithographic apparatus
#12 | 2012-09-27Lithographic apparatus
#13 | 2011-09-15Lithographic apparatus and device manufacturing method
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