Jena
Germany
38
2009-04-23
38
2015-10-27
These are the the leading inventors for applications assigned to XTREME TECHNOLOGIES GMBH:
XTREME TECHNOLOGIES GMBH based in Jena, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Arrangement for generating EUV radiation
#2 | 2009-01-15 ✅ Patent 8,147,647 granted on 2012-04-03Method and arrangement for cleaning optical surfaces in plasma-based radiation sources
#3 | 2008-11-20 ✅ Patent 7,750,327 granted on 2010-07-06Device for the generation of a gas curtain for plasma-based EUV radiation sources
#4 | 2008-10-30 ✅ Patent 7,595,594 granted on 2009-09-29Arrangement for switching high electric currents by a gas discharge
#5 | 2008-06-19 ✅ Patent 7,974,321 granted on 2011-07-05Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation source
#6 | 2008-03-20 ✅ Patent 7,599,470 granted on 2009-10-06Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
#7 | 2008-01-10 ✅ Patent 7,649,187 granted on 2010-01-19Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated
#8 | 2007-10-04 ✅ Patent 8,008,595 granted on 2011-08-30Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge
#9 | 2007-10-04 ✅ Patent 7,477,673 granted on 2009-01-13Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge
#10 | 2007-07-26 ✅ Patent 7,329,876 granted on 2008-02-12Narrow-band transmission filter for EUV radiation
#11 | 2007-04-19 ✅ Patent 7,531,820 granted on 2009-05-12Arrangement and method for the generation of extreme ultraviolet radiation
#12 | 2007-03-01 ✅ Patent 7,414,253 granted on 2008-08-19EUV radiation source with high radiation output based on a gas discharge
#13 | 2006-12-07 ✅ Patent 7,488,962 granted on 2009-02-10Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma
#14 | 2006-11-02 ✅ Patent 7,365,350 granted on 2008-04-29Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma
#15 | 2006-10-17 ✅ Patent 7,122,814 granted on 2006-10-17Arrangement for the stabilization of the radiation emission of a plasma
#16 | 2006-10-12 ✅ Patent 7,329,014 granted on 2008-02-12Collector mirror for plasma-based, short-wavelength radiation sources
#17 | 2006-10-05 ✅ Patent 7,233,013 granted on 2007-06-19Radiation source for the generation of short-wavelength radiation
#18 | 2006-08-31 ✅ Patent 7,476,884 granted on 2009-01-13Device and method for generating extreme ultraviolet (EUV) radiation
#19 | 2006-07-20 ✅ Patent 7,328,885 granted on 2008-02-12Plasma radiation source and device for creating a gas curtain for plasma radiation sources
#20 | 2006-07-18 ✅ Patent 7,079,224 granted on 2006-07-18Arrangement for debris reduction in a radiation source based on a plasma
#21 | 2006-06-29 ✅ Patent 7,218,651 granted on 2007-05-15Arrangement for the generation of a pulsed laser beam of high average output
#22 | 2006-06-27 ✅ Patent 7,068,367 granted on 2006-06-27Arrangement for the optical detection of a moving target flow for a pulsed energy beam pumped radiation
#23 | 2006-03-02 ✅ Patent 7,372,057 granted on 2008-05-13Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
#24 | 2006-02-07 ✅ Patent 6,995,382 granted on 2006-02-07Arrangement for the generation of intensive short-wave radiation based on a plasma
#25 | 2006-02-02 ✅ Patent 7,405,413 granted on 2008-07-29Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
#26 | 2006-01-26 ✅ Patent 7,368,742 granted on 2008-05-06Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation
#27 | 2005-12-15 ✅ Patent 7,274,030 granted on 2007-09-25Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
#28 | 2005-11-24 ✅ Patent 7,250,621 granted on 2007-07-31Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
#29 | 2005-09-20 ✅ Patent 6,946,669 granted on 2005-09-20Arrangement for the generation of EUV radiation with high repetition rates
#30 | 2005-09-15 ✅ Patent 7,072,370 granted on 2006-07-04Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
#31 | 2005-08-04 ✅ Patent 7,161,163 granted on 2007-01-09Method and arrangement for the plasma-based generation of soft x-radiation
#32 | 2005-07-05 ✅ Patent 6,914,920 granted on 2005-07-05Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources
#33 | 2005-05-17 ✅ Patent 6,894,285 granted on 2005-05-17Arrangement for monitoring the energy radiated by an EUV radiation source
#34 | 2005-05-17 ✅ Patent 6,894,298 granted on 2005-05-17Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge
#35 | 2005-04-19 ✅ Patent 6,882,704 granted on 2005-04-19Radiation source for generating extreme ultraviolet radiation
#36 | 2005-04-19 ✅ Patent 6,881,971 granted on 2005-04-19Arrangement for the suppression of particle emission in the generation of radiation based on hot plasma
#37 | 2005-03-08 ✅ Patent 6,865,212 granted on 2005-03-08Method for energy control of pulsed driven, gas discharged-coupled beam sources
#38 | 2005-02-15 ✅ Patent 6,855,932 granted on 2005-02-15Detector arrangement for energy measurement of pulsed x-ray radiation
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