Jena
Germany
5
2006-08-31
4
2009-02-17
These are the the leading inventors for applications assigned to Leica Microsystems Lithography GmbH:
Leica Microsystems Lithography GmbH based in Jena, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Electrostatic deflection system for corpuscular radiation
#2 | 2006-06-08Method for exposing a substrate with a beam
#3 | 2006-05-18 ✅ Patent 7,332,730 granted on 2008-02-19Device and method for imaging a multiple particle beam on a substrate
#4 | 2005-12-29 ✅ Patent 7,435,517 granted on 2008-10-14Method for reducing the fogging effect
#5 | 2005-12-29 ✅ Patent 7,241,542 granted on 2007-07-10Process for controlling the proximity effect correction
291896 ⎘