Beijing
China
117
2024-11-21
117
2026-05-19
These are the the leading inventors for applications assigned to BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD:
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD based in Beijing, CN has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Support Plate for Localized Heating in Thermal Processing Systems
#2 | 2024-10-17 ✅ Patent 12,412,758 granted on 2025-09-09Workpiece Processing Apparatus with Thermal Processing Systems
#3 | 2024-10-10 ✅ Patent 12,400,831 granted on 2025-08-26Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP) Loads
#4 | 2024-09-12 ✅ Patent 12,476,151 granted on 2025-11-18Preheat Processes for Millisecond Anneal System
#5 | 2024-09-05 ✅ Patent 12,562,342 granted on 2026-02-24Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
#6 | 2024-08-29 ✅ Patent 12,400,916 granted on 2025-08-26Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
#7 | 2024-08-22 ✅ Patent 12,261,073 granted on 2025-03-25Electrostatic chuck assembly for plasma processing apparatus
#8 | 2024-06-27 ✅ Patent 12,308,209 granted on 2025-05-20Workpiece processing apparatus with plasma and thermal processing systems
#9 | 2024-03-21 ✅ Patent 12,119,254 granted on 2024-10-15Electrostatic chuck assembly for plasma processing apparatus
#10 | 2024-02-29 ✅ Patent 12,347,677 granted on 2025-07-01Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
#11 | 2024-02-15 ✅ Patent 12,183,558 granted on 2024-12-31Workpiece processing apparatus with thermal processing systems
#12 | 2023-11-02 ✅ Patent 12,119,216 granted on 2024-10-15Arc lamp with forming gas for thermal processing systems
#13 | 2023-08-31 ✅ Patent 12,174,616 granted on 2024-12-24Control system for adaptive control of a thermal processing system
#14 | 2023-07-20 ✅ Patent 11,955,388 granted on 2024-04-09Transmission-based temperature measurement of a workpiece in a thermal processing system
#15 | 2023-03-30 ✅ Patent 12,014,920 granted on 2024-06-18Apparatus for hydrogen assisted atmospheric radical oxidation
#16 | 2023-03-30 ✅ Patent 12,080,568 granted on 2024-09-03Support plate for localized heating in thermal processing systems
#17 | 2023-03-09 ✅ Patent 12,603,256 granted on 2026-04-14Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus
#18 | 2023-02-09 ✅ Patent 11,923,215 granted on 2024-03-05Systems and methods for workpiece processing
#19 | 2023-01-19 ✅ Patent 12,347,661 granted on 2025-07-01Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus
#20 | 2023-01-12 ✅ Patent 12,009,184 granted on 2024-06-11Lift pin assembly for a plasma processing apparatus
#21 | 2023-01-05 ✅ Patent 11,837,493 granted on 2023-12-05Electrostatic chuck assembly for plasma processing apparatus
#22 | 2023-01-05 ✅ Patent 12,087,608 granted on 2024-09-10Transfer apparatus and processing system
#23 | 2023-01-05 ✅ Patent 12,009,220 granted on 2024-06-11Method for processing workpiece, plasma processing apparatus and semiconductor device
#24 | 2022-12-29 ✅ Patent 12,417,900 granted on 2025-09-16Plasma Processing Apparatus
#25 | 2022-12-01 ✅ Patent 12,266,503 granted on 2025-04-01Hybrid plasma source array
#26 | 2022-10-27 ✅ Patent 12,040,159 granted on 2024-07-16Dual frequency matching circuit for inductively coupled plasma (ICP) loads
#27 | 2022-09-29 ✅ Patent 11,848,204 granted on 2023-12-19Enhanced ignition in inductively coupled plasmas for workpiece processing
#28 | 2022-06-30 ✅ Patent 12,002,701 granted on 2024-06-04Electrostatic chuck assembly for plasma processing apparatus
#29 | 2022-06-30 ✅ Patent 12,046,489 granted on 2024-07-23Workpiece processing apparatus with thermal processing systems
#30 | 2022-06-30 ✅ Patent 12,334,312 granted on 2025-06-17Configurable Faraday Shield
#31 | 2022-06-30 ✅ Patent 12,159,770 granted on 2024-12-03Cooled shield for ICP source
#32 | 2022-06-30 ✅ Patent 12,340,981 granted on 2025-06-24Workpiece Processing Apparatus with Outer Gas Channel Insert
#33 | 2022-06-30 ✅ Patent 12,580,157 granted on 2026-03-17Grid Assembly for Plasma Processing Apparatus
#34 | 2022-06-30 ✅ Patent 12,476,077 granted on 2025-11-18Induction Coil Assembly for Plasma Processing Apparatus
#35 | 2022-06-30 ✅ Patent 12,352,306 granted on 2025-07-08Workpiece Support For A Thermal Processing System
#36 | 2022-06-23 ✅ Patent 12,442,078 granted on 2025-10-14Workpiece Processing Apparatus with Gas Showerhead Assembly
#37 | 2022-06-16 ✅ Patent 11,837,447 granted on 2023-12-05Workpiece processing apparatus with plasma and thermal processing systems
#38 | 2022-06-16 ✅ Patent 11,955,315 granted on 2024-04-09Workpiece processing apparatus with plasma and thermal processing systems
#39 | 2022-06-16 ✅ Patent 12,535,273 granted on 2026-01-27Workpiece Processing Apparatus with Thermal Processing Systems
#40 | 2022-05-26 ✅ Patent 11,721,539 granted on 2023-08-08Arc lamp with forming gas for thermal processing systems
#41 | 2022-03-17 ✅ Patent 11,791,166 granted on 2023-10-17Selective etch process using hydrofluoric acid and ozone gases
#42 | 2022-03-17 ✅ Patent 12,002,652 granted on 2024-06-04Variable mode plasma chamber utilizing tunable plasma potential
#43 | 2022-03-03 ✅ Patent 12,283,467 granted on 2025-04-22Plasma strip tool with movable insert
#44 | 2022-02-24 ✅ Patent 12,068,177 granted on 2024-08-20Rapid thermal processing system with cooling system
#45 | 2022-02-24 ✅ Patent 12,362,194 granted on 2025-07-15Rapid Thermal Processing System With Cooling System
#46 | 2021-11-25 ✅ Patent 11,315,801 granted on 2022-04-26Processing of workpieces using ozone gas and hydrogen radicals
#47 | 2021-11-04 ✅ Patent 12,159,789 granted on 2024-12-03Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
#48 | 2021-09-30 ✅ Patent 12,120,780 granted on 2024-10-15Nitrogen injection for arc lamps
#49 | 2021-09-30 ✅ Patent 11,651,977 granted on 2023-05-16Processing of workpieces using fluorocarbon plasma
#50 | 2021-09-02 ✅ Patent 11,610,824 granted on 2023-03-21Transmission-based temperature measurement of a workpiece in a thermal processing system
#51 | 2021-09-02 ✅ Patent 12,176,241 granted on 2024-12-24Support structure for thermal processing systems
#52 | 2021-07-01 ✅ Patent 11,626,269 granted on 2023-04-11Chamber seasoning to improve etch uniformity by reducing chemistry
#53 | 2021-05-06 ✅ Patent 11,644,817 granted on 2023-05-09Control system for adaptive control of a thermal processing system
#54 | 2021-04-22 ✅ Patent 11,183,397 granted on 2021-11-23Selective etch process using hydrofluoric acid and ozone gases
#55 | 2021-04-15 ✅ Patent 12,148,608 granted on 2024-11-19Post etch defluorination process
#56 | 2021-03-18 ✅ Patent 11,791,181 granted on 2023-10-17Methods for the treatment of workpieces
#57 | 2021-03-04 ✅ Patent 11,251,050 granted on 2022-02-15Silicon oxide selective dry etch process
#58 | 2021-03-04 ✅ Patent 11,257,680 granted on 2022-02-22Methods for processing a workpiece using fluorine radicals
#59 | 2021-03-04 ✅ Patent 10,950,428 granted on 2021-03-16Method for processing a workpiece
#60 | 2021-03-04 ✅ Patent 11,276,560 granted on 2022-03-15Spacer etching process
#61 | 2021-02-18 ✅ Patent 11,348,784 granted on 2022-05-31Enhanced ignition in inductively coupled plasmas for workpiece processing
#62 | 2021-01-21 ✅ Patent 11,462,413 granted on 2022-10-04Processing of workpieces using deposition process and etch process
#63 | 2021-01-21 ✅ Patent 11,164,727 granted on 2021-11-02Processing of workpieces using hydrogen radicals and ozone gas
#64 | 2021-01-21 ✅ Patent 11,189,464 granted on 2021-11-30Variable mode plasma chamber utilizing tunable plasma potential
#65 | 2021-01-21 ✅ Patent 11,049,692 granted on 2021-06-29Methods for tuning plasma potential using variable mode plasma chamber
#66 | 2021-01-07 ✅ Patent 11,195,718 granted on 2021-12-07Spacer open process by dual plasma
#67 | 2020-12-17 ✅ Patent 11,812,523 granted on 2023-11-07Thermal processing system with transmission switch plate
#68 | 2020-11-26 ✅ Patent 11,495,437 granted on 2022-11-08Surface pretreatment process to improve quality of oxide films produced by remote plasma
#69 | 2020-11-19 ✅ Patent 11,508,560 granted on 2022-11-22Focus ring adjustment assembly of a system for processing workpieces under vacuum
#70 | 2020-11-19 ✅ Patent 11,348,767 granted on 2022-05-31Plasma processing apparatus having a focus ring adjustment assembly
#71 | 2020-11-19 ✅ Patent 11,515,127 granted on 2022-11-29End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
#72 | 2020-11-12 ✅ Patent 11,810,802 granted on 2023-11-07Substrate support in a millisecond anneal system
#73 | 2020-11-05 ✅ Patent 12,027,427 granted on 2024-07-02Preheat processes for millisecond anneal system
#74 | 2020-11-05 ✅ Patent 11,164,742 granted on 2021-11-02Selective deposition using methylation treatment
#75 | 2020-11-05 ✅ Patent 11,521,847 granted on 2022-12-06Hydrogen assisted atmospheric radical oxidation
#76 | 2020-09-17 ✅ Patent 11,699,603 granted on 2023-07-11Thermal processing system with temperature non-uniformity control
#77 | 2020-07-30 ✅ Patent 11,039,527 granted on 2021-06-15Air leak detection in plasma processing apparatus with separation grid
#78 | 2020-07-23 ✅ Patent 11,764,072 granted on 2023-09-19Method for processing a workpiece using a multi-cycle thermal treatment process
#79 | 2020-07-23 ✅ Patent 11,043,393 granted on 2021-06-22Ozone treatment for selective silicon nitride etch over silicon
#80 | 2020-07-09 ✅ Patent 10,901,321 granted on 2021-01-26Strip process for high aspect ratio structure
#81 | 2020-06-25 ✅ Patent 11,387,115 granted on 2022-07-12Silicon mandrel etch after native oxide punch-through
#82 | 2020-06-25 ✅ Patent 11,062,912 granted on 2021-07-13Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
#83 | 2020-06-25 ✅ Patent 11,107,695 granted on 2021-08-31Surface smoothing of workpieces
#84 | 2020-06-23 ✅ Patent 10,692,730 granted on 2020-06-23Silicon oxide selective dry etch process
#85 | 2020-06-18 ✅ Patent 11,264,249 granted on 2022-03-01Carbon containing hardmask removal process using sulfur containing process gas
#86 | 2020-06-11 ✅ Patent 10,964,528 granted on 2021-03-30Integration of materials removal and surface treatment in semiconductor device fabrication
#87 | 2020-06-04 ✅ Patent 11,257,696 granted on 2022-02-22Systems and methods for workpiece processing
#88 | 2020-05-21 ✅ Patent 10,950,416 granted on 2021-03-16Chamber seasoning to improve etch uniformity by reducing chemistry
#89 | 2020-04-16 ✅ Patent 11,495,456 granted on 2022-11-08Ozone for selective hydrophilic surface treatment
#90 | 2020-02-27 ✅ Patent 12,399,064 granted on 2025-08-26Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures
#91 | 2020-02-06 ✅ Patent 11,251,075 granted on 2022-02-15Systems and methods for workpiece processing using neutral atom beams
#92 | 2019-12-19 ✅ Patent 10,573,532 granted on 2020-02-25Method for processing a workpiece using a multi-cycle thermal treatment process
#93 | 2019-12-19 ✅ Patent 11,586,113 granted on 2023-02-21Methods and apparatus for post exposure bake processing of a workpiece
#94 | 2019-12-12 ✅ Patent 11,164,725 granted on 2021-11-02Generation of hydrogen reactive species for processing of workpieces
#95 | 2019-10-17 ✅ Patent 11,387,111 granted on 2022-07-12Processing of workpieces with reactive species generated using alkyl halide
#96 | 2019-10-17 ✅ Patent 10,760,976 granted on 2020-09-01Thermal imaging of heat sources in thermal processing systems
#97 | 2019-10-03 ✅ Patent 11,062,910 granted on 2021-07-13Surface treatment of silicon or silicon germanium surfaces using organic radicals
#98 | 2019-09-26 ✅ Patent 11,521,868 granted on 2022-12-06Support plate for localized heating in thermal processing systems
#99 | 2019-07-18 ✅ Patent 10,679,864 granted on 2020-06-09Pre-heat processes for millisecond anneal system
#100 | 2019-07-11 ✅ Patent 10,910,228 granted on 2021-02-02Surface treatment of carbon containing films using organic radicals
Also check out Beijing E-Town Semiconductor Technology Co., Ltd.'s (Beijing, China) applicant profile with 159 patent applications submitted.
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