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Inventor profile of:

Silke Hamm

City:

Laupheim

Country:

Germany

Published Applications:

8

Last publication date:

2026-01-15

Top Assignees for applications by Silke Hamm

The entities that hold a legal rights for patent applications filed by inventor Hamm Silke:

  • BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD 4 Beijing, China
  • Matson Technology, Inc. 2 Fremont, CA United States
  • Mattson Technology, Inc. 1 Fremont, CA United States
  • Mattson Technology, Inc. 1 Fremont, Canada

Recent patent applications by Hamm Silke

Silke Hamm from Laupheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-01-15
US20260015722A1
Chemistry; metallurgy

Workpiece Processing Apparatus with Gas Showerhead Assembly

#2 | 2025-05-22
US20250167008A1
Electricity

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

#3 | 2025-03-20
US20250096032A1
Electricity

Support Structure for Thermal Processing Systems

#4 | 2024-11-14
US20240379390A1
Electricity

Rapid Thermal Processing System With Cooling System

#5 | 2022-06-23
US20220195601A1
Chemistry; metallurgy

Workpiece Processing Apparatus with Gas Showerhead Assembly

#6 | 2022-02-24
US20220059371A1
Electricity

Rapid thermal processing system with cooling system

#7 | 2022-02-24
US20220059363A1
Electricity

Rapid Thermal Processing System With Cooling System

#8 | 2021-09-02
US20210272839A1
Electricity

Support structure for thermal processing systems

InventorID:

5180338 ⎘

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