Beijing
China
9
2025-01-09
The entities that hold a legal rights for patent applications filed by inventor GUAN Changle:
Changle GUAN from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
PROCESS PLATFORM
#2 | 2023-03-09Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus
#3 | 2023-01-19Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus
#4 | 2023-01-12Lift pin assembly for a plasma processing apparatus
#5 | 2019-12-26Waste Gas Processing Device, Vacuum Coating System, and Operation Method of Waste Gas processing Device
#6 | 2019-09-26Heating assembly
#7 | 2019-06-20Cooling Member and Vacuum Coating Device
#8 | 2019-06-13Cooling plate
#9 | 2017-01-12Reaction chamber and plasma processing apparatus
1770043 ⎘