Beijing
China
15
2024-09-26
15
2026-06-02
These are the the leading inventors for applications assigned to BEIJING U-PRECISION TECH CO., LTD.:
BEIJING U-PRECISION TECH CO., LTD. based in Beijing, CN has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM, AND METHOD FOR USING SAME
#2 | 2024-02-22 ✅ Patent 12,393,127 granted on 2025-08-19EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE PHOTOLITHOGRAPHY, AND PHOTOLITHOGRAPHY SYSTEM
#3 | 2024-02-15 ✅ Patent 12,038,690 granted on 2024-07-16Laser interference photolithography system
#4 | 2023-12-28 ✅ Patent 12,460,917 granted on 2025-11-04INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM AND METHOD
#5 | 2023-12-21 ✅ Patent 12,332,041 granted on 2025-06-17HETERODYNE FIBER INTERFEROMETER DISPLACEMENT MEASURING SYSTEM AND METHOD
#6 | 2023-11-16 ✅ Patent 12,332,053 granted on 2025-06-17HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRACTION
#7 | 2023-09-07 ✅ Patent 12,346,030 granted on 2025-07-01DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF LIGHT BEAM IN LASER INTERFERENCE LITHOGRAPHY
#8 | 2022-08-18 ✅ Patent 11,940,349 granted on 2024-03-26Plane grating calibration system
#9 | 2021-08-26 ✅ Patent 11,703,361 granted on 2023-07-18Five-degree-of-freedom heterodyne grating interferometry system
#10 | 2021-06-03 ✅ Patent 11,307,018 granted on 2022-04-19Two-degree-of-freedom heterodyne grating interferometry measurement system
#11 | 2018-09-27 ✅ Patent 10,597,172 granted on 2020-03-24Magnetic-fluid momentum sphere
#12 | 2018-06-21 ✅ Patent 10,532,832 granted on 2020-01-14Magnetic levitation reaction sphere
#13 | 2018-03-22 ✅ Patent 9,995,569 granted on 2018-06-12Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
#14 | 2017-04-27 ✅ Patent 9,904,183 granted on 2018-02-27Coarse motion and fine motion integrated reticle stage driven by planar motor
#15 | 2017-02-23 ✅ Patent 9,791,789 granted on 2017-10-17Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
Also check out BEIJING U-PRECISION TECH CO., LTD.'s (Beijing, China) applicant profile with 16 patent applications submitted.
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