Beijing
China
30
2024-09-26
The entities that hold a legal rights for patent applications filed by inventor Yang Kaiming:
Kaiming Yang from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM, AND METHOD FOR USING SAME
#2 | 2024-08-08Scanning interference lithographic system
#3 | 2024-02-22EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE PHOTOLITHOGRAPHY, AND PHOTOLITHOGRAPHY SYSTEM
#4 | 2024-02-15Laser interference photolithography system
#5 | 2023-11-09Vertical motion protection method and device based on dual-stage motion system of photolithography machine
#6 | 2023-09-07DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF LIGHT BEAM IN LASER INTERFERENCE LITHOGRAPHY
#7 | 2022-08-18Plane grating calibration system
#8 | 2022-01-27SEAL GASKET FOR FLAT PLATE STRUCTURE AND SEALING STRUCTURE THEREOF
#9 | 2021-02-04Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system
#10 | 2018-09-27Magnetic-fluid momentum sphere
#11 | 2018-06-21Magnetic levitation reaction sphere
#12 | 2018-03-22Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
#13 | 2017-04-27Coarse motion and fine motion integrated reticle stage driven by planar motor
#14 | 2017-02-23Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
#15 | 2016-06-02Three-DOF heterodyne grating interferometer displacement measurement system
#16 | 2016-05-19TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
#17 | 2015-12-24Negative stiffness system for gravity compensation of micropositioner
#18 | 2015-12-17Optical grating phase modulator for laser interference photoetching system
#19 | 2015-11-26Heterodyne grating interferometer displacement measurement system
#20 | 2015-11-12MAGLEV WORKPIECE TABLE WITH SIX DEGREES OF FREEDOM
#21 | 2015-09-24Dual-frequency grating interferometer displacement measurement system
#22 | 2015-04-09Method for measuring displacement of planar motor rotor
#23 | 2015-03-26Method for measuring displacement of large-range moving platform
#24 | 2015-03-19Single degree of freedom vibration isolating device of linear motor and motion control method thereof
#25 | 2015-01-08Planar motor rotor displacement measuring device and its measuring method
#26 | 2014-06-12Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space
#27 | 2013-02-14Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
#28 | 2013-01-24Two-dimensional locating method of motion platform based on magnetic steel array
#29 | 2010-08-19Dual-stage switching system for lithographic machine
#30 | 2010-07-29Micro stage with 6 degrees of freedom
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