Beijing
China
22
2022-06-23
The entities that hold a legal rights for patent applications filed by inventor Xu Dengfeng:
Dengfeng Xu from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
High-resolution phase detection method and system based on plane grating laser interferometer
#2 | 2018-06-21Magnetic levitation reaction sphere
#3 | 2018-03-22Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
#4 | 2016-06-02Three-DOF heterodyne grating interferometer displacement measurement system
#5 | 2016-05-19TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
#6 | 2015-12-24Negative stiffness system for gravity compensation of micropositioner
#7 | 2015-12-17Optical grating phase modulator for laser interference photoetching system
#8 | 2015-11-26Heterodyne grating interferometer displacement measurement system
#9 | 2015-11-12MAGLEV WORKPIECE TABLE WITH SIX DEGREES OF FREEDOM
#10 | 2015-09-24Dual-frequency grating interferometer displacement measurement system
#11 | 2015-04-09Method for measuring displacement of planar motor rotor
#12 | 2015-03-26Method for measuring displacement of large-range moving platform
#13 | 2015-03-19Single degree of freedom vibration isolating device of linear motor and motion control method thereof
#14 | 2015-01-08Planar motor rotor displacement measuring device and its measuring method
#15 | 2014-06-12Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space
#16 | 2014-03-13Dual wafer stage switching system for a lithography machine
#17 | 2013-01-24Two-dimensional locating method of motion platform based on magnetic steel array
#18 | 2012-05-24Dual wafer stage exchanging system for lithographic device
#19 | 2012-04-26Dual-stage exchange system for lithographic apparatus
#20 | 2012-04-26Dual-stage exchange system for lithographic apparatus
#21 | 2010-08-19Dual-stage switching system for lithographic machine
#22 | 2010-07-29Micro stage with 6 degrees of freedom
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